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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Xin Li Jing Ma Hai-bo Xu Zhi-chao Jia |
| Copyright Year | 2013 |
| Description | Author affiliation: Comput. Center, Harbin Univ. of Sci. & Technol., Harbin, China (Xin Li) || Coll. of Autom., Harbin Univ. of Sci. & Technol., Harbin, China (Jing Ma; Hai-bo Xu; Zhi-chao Jia) |
| Abstract | This article describes a micromachined quartz tuning fork resonator, 6 mm in height by 2 mm in diamter, holding a two-terminal electronic component with a nomial frequency of 36 kHz (at zero degree) and 15 pF typical capacitance packed in a 90 Pa He gas sealed metal container, which has been used as a sensor for temperature measurement with good sensitivity, repeatability and reliability. The temperature sensor is ZYtw-cut-quartz crystal bulk acoustic wave resonator vibrating in a flexural mode. Finite element method is used to analyze the vibratory modes and optimize the structure of the sensor. Design and performance analysis of the quartz tuning fork temperature sensor has been conducted. The sensor prototype was successfully fabricated and calibrated in operation from 0°C to 100°C with sensitivity of 80 ppm/°C. |
| Starting Page | 759 |
| Ending Page | 762 |
| File Size | 468257 |
| Page Count | 4 |
| File Format | |
| e-ISBN | 9781467363525 |
| e-ISBN | 9781467363518 |
| DOI | 10.1109/NEMS.2013.6559839 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2013-04-07 |
| Publisher Place | China |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Vibrations Temperature sensors Resonant frequency Finite element analysis Crystals Temperature measurement Temperature Finite element method Tuning fork resonator Micromachined temprature sensor |
| Content Type | Text |
| Resource Type | Article |
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