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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Byeungleul Lee Jinwoo Jeong Chanseob Cho Jinseok Kim Bonghwan Kim Hyeon Cheol Kim Kukjin Chun |
| Copyright Year | 2013 |
| Description | Author affiliation: Catholic Univ. of Daegu, Gyeongsan, South Korea (Bonghwan Kim) || Center for Bionics, Korea Inst. of Sci. & Technol., Seoul, South Korea (Jinseok Kim) || Electr. Eng., Univ. of Ulsan, Ulsan, South Korea (Hyeon Cheol Kim) || Mechatron. Eng., Korea Univ. of Technol. & Educ., Cheonan, South Korea (Byeungleul Lee) || Electr. & Comput. Eng., Seoul Nat. Univ., Seoul, South Korea (Jinwoo Jeong; Kukjin Chun) || Sch. of Electr. Eng., Kyungpook Nat. Univ., Daegu, South Korea (Chanseob Cho) |
| Abstract | We developed a cantilever-arrayed blood pressure sensor array fabricated by (111) silicon bulk-micromachining for the noninvasive and continuous measurement of blood pressure. The blood pressure sensor measures the blood pressure based on the change in resistance of the piezoresistor on a 5-μm-thick-arrayed perforated membrane and 20-μm-thick metal pads. The length and width of the unit membrane are 210 and 310 μm, respectively. The width of the insensible zone between adjacent units is only 10 μm. The resistance change over contact force was measured to verify the performance. The good linearity of the result confirmed that the PDMS package transfers the forces appropriately. The measured sensitivity was about 4.5%/N. The maximum measurement range and resolution of the fabricated blood pressure sensor were greater than 900 mmHg and less than 1 mmHg, respectively. |
| Starting Page | 907 |
| Ending Page | 910 |
| File Size | 356747 |
| Page Count | 4 |
| File Format | |
| e-ISBN | 9781467363525 |
| e-ISBN | 9781467363518 |
| DOI | 10.1109/NEMS.2013.6559870 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2013-04-07 |
| Publisher Place | China |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Blood pressure Silicon Biomedical monitoring Pressure measurement Force Arteries Force sensors PDMS Blood pressure sensor contact force sensor |
| Content Type | Text |
| Resource Type | Article |
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