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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Shibazaki, T. Li, L. Shinohara, H. Shoji, S. Mizuno, J. Tsunozaki, K. Kawaguchi, Y. |
| Copyright Year | 2011 |
| Description | Author affiliation: Research Center Asahi Glass Co., Ltd. Kanagawa, JAPAN (Tsunozaki, K.; Kawaguchi, Y.) || Major in Nano-Science and Nano-Engineering Waseda University Tokyo, JAPAN (Shibazaki, T.; Li, L.; Shinohara, H.; Shoji, S.; Mizuno, J.) |
| Abstract | In this study, a fluorinated UV-curable resin was replicated by UV imprinting and used as a film mold. The film mold was fabricated by anti-sticking process (ACP). A remarkable advantage of the application for easy mold fabrication is expected, because it uses only UV imprinting. We evaluated two types of the pattern replications, directions between the stage movement and line and space (L&S) patterns in perpendicular as well as in parallel. The results of replication tests show obvious difference between UV roller imprinting and UV roller press imprinting. In addition, Vickers hardness is measured to evaluate the thermal property of UV roller imprinting. The results indicate that temperature is effective not only to improve pattern replication, but also to accelerate UV curing. |
| Starting Page | 1254 |
| Ending Page | 1257 |
| File Size | 540771 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781612847757 |
| e-ISBN | 9781612847771 |
| DOI | 10.1109/NEMS.2011.6017585 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2011-02-20 |
| Publisher Place | Taiwan |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Conferences effect of heat UV roller imprinting UV roller press imprinting fluorinated UV-curable resin stage direction of movement |
| Content Type | Text |
| Resource Type | Article |
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