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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Liu, C.F. Pan, C.T. Tseng, J.K. Chen, Y.J. |
| Copyright Year | 2011 |
| Description | Author affiliation: Department of Mechanical Engineering, R.O.C. Military Academy, Kaohsiung, Taiwan, ROC (Liu, C.F.; Tseng, J.K.) || Department of Mechanical and Electro-Mechanical Engineering, Center for Nanoscience & Nanotechnology, National Science Council Core Facilities Laboratory for Nano-Science and Nano-Technology in Kaohsiung-Pingtung area. National Sun Yat-Sen University, ROC (Pan, C.T.) || Department of Mechanical and Electro-Mechanical Engineering, Center for Nanoscience & Nanotechnology, National Sun Yat-Sen University, Kaohsiung 804, Taiwan (Chen, Y.J.) |
| Abstract | Dry thin film process involves complicated procedures and expensive equipments. In this study, wet processes using electroless deposition of silver (Ag) and electrophoretic deposition (EPD) of Al were realized. The result of Ag and Al layer on glass of TFT is presented. Since Ag exhibits low resistivity, it is selected to be the material of conductive layer. The electrical and mechanical properties of Ag thin film as a function of the deposition time and temperature were studied. Nano-scale Al powders with a mean particle size of 20 nm in diameter was prepared for the electrophoretic deposition to form an insulator layer. Various pH values from 1 to 10 were formulated to obtain colloidally stabilized electrophoretic suspensions. The concentration levels are set from 1.25 to 7.5 wt %; and the deposition time is set from 5∼15 seconds to obtain stabilized depositions. After the electrophoretic process, the depositions of Ag and Al were sintered. Four-point probe, surface analyzer and Nano indenter were used to measure the electrical resistivity and mechanical properties of the depositions. |
| Starting Page | 297 |
| Ending Page | 300 |
| File Size | 502893 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781612847757 |
| e-ISBN | 9781612847771 |
| DOI | 10.1109/NEMS.2011.6017352 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2011-02-20 |
| Publisher Place | Taiwan |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Aluminum oxide Suspensions Temperature Conductivity Glass Thin film transistors Silver nano indenter TFT Al2O3 electrophoretic deposition insulating layer |
| Content Type | Text |
| Resource Type | Article |
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