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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Junbo Wang Yanlong Shang Sheng Tu Lei Liu Deyong Chen |
| Copyright Year | 2011 |
| Description | Author affiliation: State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing, China (Junbo Wang; Yanlong Shang; Sheng Tu; Lei Liu; Deyong Chen) |
| Abstract | A resonant accelerometer with high sensitivity, fabricated through MEMS bulk-silicon processes, is proposed in this paper. The external acceleration can be transferred into the frequency shift of the resonant beams which is double-clamped by the proof mass and the anchor. To improve the sensitivity of the accelerometer, a micro leverage force amplifying mechanism is adopted, from which the transformation efficiency between the external acceleration and the axial stress of the resonant beam would be improved obviously. MEMS bulk-silicon processes were used on single one wafer to fabricate the sensor chip. The electromagnetic excitation and detection was used to make the closed-loop control of the sensor easier. Experimental results show that the Q-factor of the resonant beam is about 450 and the sensitivity of the accelerometer is about 1900Hz/g. |
| Starting Page | 527 |
| Ending Page | 530 |
| File Size | 277494 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781612847757 |
| e-ISBN | 9781612847771 |
| DOI | 10.1109/NEMS.2011.6017409 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2011-02-20 |
| Publisher Place | Taiwan |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Accelerometers Sensitivity Stress Silicon Particle beams Electrodes Acceleration High Q-factor MEMS Resonant Accelerometer High Sensitivity |
| Content Type | Text |
| Resource Type | Article |
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