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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Hye Jin Kim Jae Woo Lee Lee, S.Q. Sang Kyun Lee Kang Ho Park |
| Copyright Year | 2007 |
| Description | Author affiliation: Electron. & Telecommun. Res. Inst., Daejeon (Hye Jin Kim; Jae Woo Lee; Lee, S.Q.; Sang Kyun Lee; Kang Ho Park) |
| Abstract | This paper presents a miniature condenser microphone with a flexure hinge diaphragm for portable terminals applications. MEMS technology has been successfully applied to miniature silicon capacitive microphones, and we fabricated the smallest condenser silicon microphone in the presented reports. We used the finite-element analysis (FEA) to evaluate mechanical and acoustic performances of the condenser microphone with a flexure hinge diaphragm. From the simulation results, we confirmed that the sensitivity of a flexure hinge diaphragm can be improved about 285 times higher than a flat diaphragm. The first and second modes occurred at 15,637 Hz and 24,387 Hz, respectively. The areas of the miniature condenser microphones with a hinge diaphragm are 1.5 mm times 1.5 mm. We measured the impedance characteristics and sensitivities of the fabricated condenser microphones. The sensitivities of microphones are around 12.87 muV/Pa (-60 dB ref. 12.5 mV/Pa) at 1 kHz under a low bias voltage of 1 V, and the frequency response is flat up to 13 kHz. |
| Starting Page | 788 |
| Ending Page | 791 |
| File Size | 710670 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781424412617 |
| ISSN | 19300395 |
| DOI | 10.1109/ICSENS.2007.4388518 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2007-10-28 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Microphones Fasteners Silicon Micromechanical devices Finite element methods Performance analysis Performance evaluation Impedance measurement Low voltage Frequency response |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electrical and Electronic Engineering |
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