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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Myung Lae Lee Sung Sik Lee Sung Hae Jung Chang Han Je Gunn Hwang Chang Auck Choi |
| Copyright Year | 2007 |
| Description | Author affiliation: Electron. & Telecommun. Res. Inst. (ETRI), Daejeon (Myung Lae Lee; Sung Sik Lee; Sung Hae Jung; Chang Han Je; Gunn Hwang; Chang Auck Choi) |
| Abstract | A novel readout integrated circuit (ROIC) with tunable sensitivity, variable resolution, and especially multiple and selectable input ranges is designed, fabricated, and characterized for various capacitive MEMS sensors. The ROIC was fabricated by using 0.35 mum 3.3 V CMOS process and consisted of a capacitance-to-time (C-T) converter, a high speed signal counter, a phase-locked loop (PLL), control logics and synchronous peripheral interfaces (SPI). By using SPI, the clock frequency $(f_{CLK})$ of the ROIC can be changed from 10 MHz to 160 MHz, which results in resolutions up to 14 bit. The measured minimum detectable capacitance of the ROIC were 2.86 fF for $f_{CLK}$ = 10 MHz and 180 aF for $f_{CLK}$ = 160 MHz, which were equivalent to 9 bit and 14 bit resolutions, respectively. |
| Starting Page | 260 |
| Ending Page | 263 |
| File Size | 527723 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781424412617 |
| ISSN | 19300395 |
| DOI | 10.1109/ICSENS.2007.4388386 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2007-10-28 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Fabrication Micromechanical devices Capacitive sensors Sensor phenomena and characterization Signal resolution Capacitance Phase locked loops Tunable circuits and devices CMOS process Signal processing |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electrical and Electronic Engineering |
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