NDLI: Modeling of diaphragms for micromachined condenser microphones

Content Provider	IEEE Xplore Digital Library
Author	Ganji, B.A. Majlis, B.Y.
Copyright Year	2004
Description	Author affiliation: MEMS Lab. Inst. of Microengineering & Nanoelectronics, Univ. Kebangsaan Malaysia, Selangor, Malaysia (Ganji, B.A.; Majlis, B.Y.)
Abstract	We present and compare the different kinds of diaphragms for micromachined condenser microphones. The aim is to develop the microphones with high sensitivity. For micromachining diaphragm, there is significant internal (residual) stress, which strongly decreases the mechanical sensitivity of diaphragm. An analysis was performed using the MATLAB software. According to our calculations, a corrugated diaphragm can greatly increase the mechanical sensitivity of the microphone diaphragms due to the reduction of the initial stress effect without changing the process conditions. A planar diaphragm is more rigid than a corrugated diaphragm at either small and large deflections (or pressures) when both diaphragms have same level of initial stress. Flat diaphragms show a nonlinear relation between the deflection and the applied pressure. The nonlinearity is caused by stress due to stretching of the diaphragm. It has been shown that corrugated diaphragms have a larger linear range than flat diaphragms, because of the achieved reduction of the initial stress in the diaphragm.
File Size	2818344
File Format	PDF
ISBN	0780386582
DOI	10.1109/SMELEC.2004.1620829
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2004-12-07
Publisher Place	Malaysia
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Microphones Residual stresses Micromechanical devices Micromachining Silicon Mathematical model Laboratories Nanoelectronics Internal stresses Performance analysis initial stress MEMS condenser microphone flat and corrugated diaphragms
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in