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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Qi Chen Ji Fang Hai-Feng Ji Varahramyan, K. |
| Copyright Year | 2007 |
| Description | Author affiliation: Louisiana Tech Univ., Ruston (Qi Chen; Ji Fang; Hai-Feng Ji; Varahramyan, K.) |
| Abstract | As an outstanding sensor platform, surface-stress sensing microcantilevers have potential application in moisture detection. To enlarge the deflection of the microcantilever under surface stress induced by specific reactions, a new $SiO_{2}$ microcantilever is developed which features a much lower Young's modulus than conventional Si or $SiN_{x}$ microcantilevers. For comparing $SiO_{2}$ cantilever with Si cantilevers, simulation of the cantilever sensor is given, resulting in good agreement with the experimental data. To fabricate this device, a new fabrication process using isotropic combined with anisotropic dry etching to release the $SiO_{2}$ microcantilever beam by ICP (inductively coupled plasma) was developed and investigated. Attributed to the high sensitivity, significant deflection amplitude of the surface modified $SiO_{2}$ microcantilever was observed upon exposure to one percentage relative humidity. |
| Starting Page | 1436 |
| Ending Page | 1439 |
| File Size | 2603527 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781424412617 |
| ISSN | 19300395 |
| DOI | 10.1109/ICSENS.2007.4388683 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2007-10-28 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Sensor phenomena and characterization Moisture Stress Silicon compounds Fabrication Anisotropic magnetoresistance Dry etching Particle beams Optical coupling Plasma applications |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electrical and Electronic Engineering |
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