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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Se-Chul Park Seung-Il Yoon Chung-Il Lee Soonho Song Yong-Jun Kim |
| Copyright Year | 2007 |
| Description | Author affiliation: Yonsei Univ., Seoul (Se-Chul Park; Seung-Il Yoon; Chung-Il Lee; Soonho Song; Yong-Jun Kim) |
| Abstract | This paper reports a new MEMS-based chemical sensor for hydrogen gas detection, using a highly sensitive micro-thermal sensor. The proposed micro-thermal sensor detects the reaction heat between novel metal catalyst and hydrogen by measuring dc voltage from Cr-Bi thermopile. The proposed micro-thermal sensor, which consists of reference and sensing thermopile, was fabricated on a high thermal resistivity layer for reducing parasitic heat transfer. A metal catalyst was deposited on only the sensing thermopile. And then, In order to remove noises such as external change of temperature, gas flow and electrical noise, a difference between output signals of reference and sensing thermopile was measured by using differential amplifier. To verify its feasibility of the sensor for hydrogen gas detection, various concentrations (0.1, 0.5, 1%) of hydrogen gas were measured. The result of the measurement shows that output voltages of the sensor increases linearly according to the gas concentrations. |
| Starting Page | 197 |
| Ending Page | 200 |
| File Size | 639033 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781424412617 |
| ISSN | 19300395 |
| DOI | 10.1109/ICSENS.2007.4388370 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2007-10-28 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Hydrogen Chemical sensors Gas detectors Thermal sensors Voltage measurement Thermal resistance Conductivity Heat transfer Temperature sensors Fluid flow |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electrical and Electronic Engineering |
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