NDLI: Optical Thin Films with Very Low Refractive Index and Their Application in Photonic Devices

Content Provider	IEEE Xplore Digital Library
Author	Xi, J.-Q. Jong Kyu Kim Dexian Ye Juneja, J.S. Lu, T.-M. Shawn-Yu Lin Schubert, E.F.
Copyright Year	2005
Description	Author affiliation: Future Chips Constellation, Troy, NY (Xi, J.-Q.; Jong Kyu Kim)
Abstract	The refractive index contrast in dielectric multilayer structures, optical resonators and photonic crystals is an important figure of merit, which creates a strong demand for high quality thin films with a very low refractive index. $SiO_{2}$ nano-rod layers with low refractive indices n= 1.08, the lowest ever reported in thin-film materials, is grown by oblique-angle e-beam deposition of nano-rod layer with vapor incident angle thetas = 85deg. Scanning electron micrographs reveal a highly porous columnar structure of the low-refractive-index (low-n) film. The gap between the $SiO_{2}$ nano-rods is les 50 nm, i.e. much smaller than the wavelength of visible light, and thus sufficiently small to make scattering negligibly small. Optical micrographs of the low-n film deposited on a Si substrate reveal a uniform specular film with no apparent scattering. The unprecedented low index of the $SiO_{2}$ nano-rod layer is confirmed by both ellipsometry measurements and thin film interference measurements. A single-pair distributed Bragg reflector (DBR) employing the $SiO_{2}$ nano-rod layer is demonstrated to have enhanced reflectivity, showing the great potential of low-n films for applications in photonic structures and devices
Starting Page	428
Ending Page	429
File Size	361184
Page Count	2
File Format	PDF
ISBN	142440083X
DOI	10.1109/ISDRS.2005.1596169
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2005-12-07
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Optical films Refractive index Dielectric thin films Optical scattering Optical resonators Optical refraction Light scattering Particle scattering Semiconductor films Distributed Bragg reflectors
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
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3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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