NDLI: Design of a decoupled 2-DOF translational parallel micro-positioning stage

Content Provider	IEEE Xplore Digital Library
Author	Leijie Lai Guo-Ying Gu Pengzhi Li LiMin Zhu
Copyright Year	2011
Description	Author affiliation: State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, 200240, China (Leijie Lai; Guo-Ying Gu; Pengzhi Li; LiMin Zhu)
Abstract	In this paper, a new type of decoupled 2-DOF translational parallel micro-positioning stage is designed to realize the 2-DOF ultra-precision linear motion. The stage consists of two piezoelectric actuators (PZTs) and a monolithic compliant mechanism. The monolithic compliant mechanism adopts two types of compound double parallel four-leaf flexures and a mirror symmetric structure to reduce the input and output cross coupling and parasitic motion. Based on the stiffness matrix method and screw theory, a mathematical model is constructed to analyze the compliant mechanism. The optimal design is performed in view of performance constraints. The design results show good static and dynamic performances of the stage, which are well validated by the simulation of finite-element-analysis (FEA) and experimental results. The experimental results show that the proposed stage has a full range of 40µm × 40µm when the full voltage(100V) is applied on the two PZTs. Besides, the stage only has the maximum cross coupling of -50dB between the two axes, low enough to utilize single-input-single-out(SISO) control strategies for positioning and tracking.
Starting Page	5070
Ending Page	5075
File Size	484393
Page Count	6
File Format	PDF
ISBN	9781612843865
ISSN	10504729
e-ISBN	9781612843858
DOI	10.1109/ICRA.2011.5979723
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-05-09
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Fasteners Force Compounds Couplings Stress Transforms Mathematical model
Content Type	Text
Resource Type	Article
Subject	Artificial Intelligence Control and Systems Engineering Electrical and Electronic Engineering Software

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