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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Yong-Jin Kim Pyung-Woo Lee Hong-Young Chang |
| Copyright Year | 1995 |
| Description | Author affiliation: Dept. of Phys., Korea Adv. Inst. of Sci. & Technol., Taejon, South Korea (Yong-Jin Kim; Pyung-Woo Lee; Hong-Young Chang) |
| Abstract | Summary form only given, as follows. The relative concentration of the neutral radical atom can be determined by using optical emission actinometry (OEA). In OEA, a gas species called actinomer is added to compensate the effect of the plasma, that is, the excitation rate by electron impact. Therefore, if the concentration of the actinomer atoms can be assumed to be constant, the relative concentration of the radical atoms can be determined. But, for the nonuniform distribution of actinomer atom concentration which may appear in the fast pumping system (assumption of the constant radial profile of the actinomer concentration may not be proper). From this motivation, we have engaged an idea for the compensation of the plasma effect directly by using the plasma parameters which can be measured easily. We would call this as plasma parameter normalization method. Hutchinson derived a formula of k/sub c/ for the emission of atoms excited by the electrons of which energy distribution was Maxwellian. From this, we want to suggest a new method to determine relative concentration of the radical species, and the different change of the uniformities of the two neutral species, Ar, and F. |
| Starting Page | 154 |
| Ending Page | 155 |
| File Size | 193614 |
| Page Count | 2 |
| File Format | |
| ISBN | 0780326695 |
| ISSN | 07309244 |
| DOI | 10.1109/PLASMA.1995.531605 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1995-06-05 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Atomic measurements Plasma measurements Probes Magnetic field measurement Electrons Atom optics Plasma diagnostics Plasma temperature Nuclear and plasma sciences Physics |
| Content Type | Text |
| Resource Type | Article |
| Subject | Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering |
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