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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Shen, W. Scharer, J.E. Porter, B.G. Lam, N.T. Kelly, K.L. |
| Copyright Year | 1995 |
| Description | Author affiliation: Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA (Shen, W.; Scharer, J.E.; Porter, B.G.; Lam, N.T.; Kelly, K.L.) |
| Abstract | Summary form only. An excimer-laser (/spl lambda/=193 nm, r=17 nS, E=20 mJ) along with a cylindrical lens system is utilized to produce a sheet plasma, in an organic gas (TMAE). The plasma has a peak density of 3.5/spl times/10/sup 13/ cm/sup -3/ and a "sheet" like profile of 0.2-0.7 cm/spl times/8 cm/spl times/20 cm. The effect of the lens system on the plasma, sheet thickness is examined. The triple probe measured plasma temperature (T/sub e//spl ap/1 eV) agrees with the postulation of single-photon absorption-ionization process. The plasma density spatial decay along the laser beam, which is associated with TMAE photon absorption length, is measured. The absorption length is found to be a function of base pressure of the neutral working gas. We have obtained an optimal window of TMAE base pressure at 50-150 mTorr. Within this optimal pressure range a plasma formation can have a long absorption length (L/sub a//spl ges/10 cm), relatively high plasma density (n/sub e//spl ges/5/spl times/10/sup 12/ cm/sup -3/), and lifetime of 5 /spl mu/s. A 1-D plasma diffusion model is proposed and solved both analytically and numerically. Comparison of the modeling and the measured results yields accurate values for the plasma diffusion and recombination coefficients. |
| File Size | 106442 |
| File Format | |
| ISBN | 0780326695 |
| ISSN | 07309244 |
| DOI | 10.1109/PLASMA.1995.531568 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1995-06-05 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Plasma density Plasma measurements Plasma temperature Absorption Gas lasers Lenses Probes Temperature measurement Particle beams Particle beam measurements |
| Content Type | Text |
| Resource Type | Article |
| Subject | Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering |
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