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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Mouzouris, Y. Scharer, J.E. Bettenhausen, H. |
| Copyright Year | 1995 |
| Description | Author affiliation: Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA (Mouzouris, Y.; Scharer, J.E.; Bettenhausen, H.) |
| Abstract | Summary form only given, as follows. A computer code for modelling existing and new helicon sources has been developed and results are presented. The Nagoya type-III, helical and Stix coil antennas have been modelled to study and examine plasma density and temperature profile effects on power absorption of a small fraction (n/sub fe//n/sub e//spl ap/5%) of ionizing fast electrons (T/sub e-fast//spl sim/40 eV) and bulk (T/sub e-slow//spl sim/3 eV) electron distributions in an argon gas. The competing effects of collisional and Landau damping heating mechanisms have been investigated, as well as the scaling of the plasma source radius on RF power deposition. The "ANTENA" computer code to study ion cyclotron waves, was modified and used to study and model helicon sources. A collisional model that includes radial density and temperature profiles was added to the code to study the effect of collisions on the heating mechanisms. Detailed studies of the effects of plasma density and temperature radial profiles on radiofrequency wave absorption are considered. The influence of m=0, +1 and higher order modes on the heating profile for different helicon sources is presented. Preliminary studies of the plasma transport between the source and the wafer region are also presented. |
| File Size | 99880 |
| File Format | |
| ISBN | 0780326695 |
| ISSN | 07309244 |
| DOI | 10.1109/PLASMA.1995.531548 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1995-06-05 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Plasma sources Plasma temperature Plasma density Heating Electrons Radio frequency Coils Helical antennas Temperature distribution Absorption |
| Content Type | Text |
| Resource Type | Article |
| Subject | Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering |
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