NDLI: On-chip LDO voltage regulator failure analysis and yield improvement

Content Provider	IEEE Xplore Digital Library
Author	Re-Long Chiu Higgins, J. Shu-Lan Ying Gang Wang Chiu, Q. Delilah, B. Chung, J.
Copyright Year	2011
Description	Author affiliation: WaferTech LLC, 5509 N.W. Parker St. Camas, WA 98607-9299 USA (Re-Long Chiu; Higgins, J.; Shu-Lan Ying; Gang Wang; Chiu, Q.; Delilah, B.; Chung, J.)
Abstract	Low dropout (LDO) voltage regulators are extensively used to provide a stable power supply voltage independent of load impedance, input voltage variations, temperature, and time. The increasing number of portable applications has led LDO circuit design into portable application chips which include embedded NOR type Flash, Mixed Signal/RF products, chip cardiac pacemaker and so on to maintain the system voltage independently of the state of battery charge. On-chip LDO voltage regulator function fail is one of major yield impact item and also reliability concern of portable system, but less FA article discussed, the electric FA and PFA in this paper. Two on-chip LDO circuit FA case analyzed by combining different failure analysis methods and tools. ILD CMP scratch and RPO etching damage confirmed by duplication on experimental wafers.
Starting Page	1
Ending Page	4
File Size	1460520
Page Count	4
File Format	PDF
ISBN	9781457701597
ISSN	19461550
e-ISBN	9781457701580
DOI	10.1109/IPFA.2011.5992748
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-07-04
Publisher Place	Korea (South)
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Voltage control System-on-a-chip Regulators Etching Photonic band gap Silicon Junctions
Content Type	Text
Resource Type	Article

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