NDLI: Low-loss micro-machined four-pole linear phase filter in silicon technology

Content Provider	IEEE Xplore Digital Library
Author	Gautier, W. Stehle, A. Schoenlinner, B. Ziegler, V. Prechtel, U. Menzel, W.
Copyright Year	2009
Description	Author affiliation: University of Ulm, Institute of Microwave Techniques, Albert-Einstein-Allee 41, D-89069 Ulm, Germany (Menzel, W.) \|\| EADS Deutschland GmbH, Innovation Works, Willy-Messerschmitt-Str., D-85521 Ottobrunn, Germany (Schoenlinner, B.; Ziegler, V.; Prechtel, U.) \|\| EADS Deutschland GmbH, Defence Electronics, Woerthstr. 85, D-89077 Ulm, Germany (Gautier, W.; Stehle, A.)
Abstract	In this paper, a micro-machined linear phase filter for K-band satellite communication is presented. The filter is a four-pole cavity resonator band-pass filter. It is fabricated in silicon using the KOH-wet etching technique, and the filter is assembled by bonding two silicon wafers. The proposed configuration enables the realisation of low-loss and low-cost filters, which are easily integrable, monolithically or in a hybrid fashion, in microwave front-ends. Further, as it is described in the paper, the arrangement proposed for the cavity resonators allows for the realisation of cross-couplings between the cavity resonators, and it makes possible the design of compact linear phase filters. This paper presents the design and the measurement of a single micro-machined cavity resonator, and it describes the design procedure of the four-pole filter. This design of the complete four-pole micro-machined linear phase filter is finally assessed by full-wave simulation.
Starting Page	1413
Ending Page	1416
File Size	381885
Page Count	4
File Format	PDF
ISBN	9781424447480
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-09-29
Publisher Place	Italy
Access Restriction	Subscribed
Rights Holder	EUMA
Subject Keyword	Nonlinear filters Silicon Resonator filters Band pass filters Microwave filters Cavity resonators K-band Satellite communication Etching Assembly
Content Type	Text
Resource Type	Article

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