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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Burg, T.P. Manalis, S.R. |
| Copyright Year | 2005 |
| Description | Author affiliation: Dept. of Electr. Eng. & Comput. Sci., Massachusetts Univ., USA (Burg, T.P.) |
| Abstract | Microfabricated transducers enable the label-free detection of biomolecules in nanoliter size samples. We have recently developed a new resonant micromechanical mass sensor that is exceptionally well suited for the detection of biomolecular interactions in a microfluidic framework. Our approach completely eliminates viscous damping by confining the fluid to the inside of a hollow resonator of less than 0.1 nL volume. However, previously we had not been able to integrate all device components and the connecting fluidics in a single package. In this paper, we present for the first time a complete chip-level package that enables efficient fluid delivery and, at the same time, provides integrated electrical contacts to actuate the resonator electrostatically. Combining these components required the development of a new packaging process: thin gaskets of poly(dimethylsiloxane) (PDMS) are micromolded and then bonded in selected areas to a metallized and patterned carrier substrate. While the process flow was specifically developed for the resonant sensor described below, the result is a general technique that can greatly simplify the packaging of many other biomedical devices using microfluidics. |
| Starting Page | 264 |
| Ending Page | 267 |
| File Size | 3003813 |
| Page Count | 4 |
| File Format | |
| ISBN | 0780387112 |
| DOI | 10.1109/MMB.2005.1548444 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2005-05-12 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Microfluidics Packaging Microchannel Resonance Biosensors Transducers Molecular biophysics Micromechanical devices Damping Joining processes low-temperature bonding label-free biosensor resonant mass sensor vibrating tube resonator PDMS |
| Content Type | Text |
| Resource Type | Article |
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