NDLI: Access to microsystem technology: the CMP services solution

Content Provider	IEEE Xplore Digital Library
Author	Charlot, B. Courtois, B. Delori, H. Paillotin, J.-F. Torki, K.
Copyright Year	2002
Description	Author affiliation: CMP, Grenoble, France (Charlot, B.; Courtois, B.; Delori, H.; Paillotin, J.-F.; Torki, K.)
Abstract	CMP aims at providing Universities, Research Laboratories and Industries with the possibility to have their integrated circuits projects fabricated for prototyping and low volume production. Presently, users are serviced for CMOS double layer poly/double layer metal (DLP/DLM) 0.8 /spl mu/, DLM/TLM 0.6 /spl mu/, DLP/4LM 0.35 /spl mu/, SLP/6LM 0.18 /spl mu/ and 0.12 /spl mu/, BiCMOS DLP/DLM 0.8 /spl mu/, SiGe BiCMOS DLP/DLM 0.8 /spl mu/ and 5 LM 0.35 /spl mu/, and HEMT GaAs 0.2 /spl mu/. About 40 multi-project runs are offered per year. Micro Electro Mechanical Systems (MEMS) are provided in standard CMP runs in CMOS DLP/DLM 0.8 /spl mu/m and DLM/TLM 0.6 /spl mu/, BiCMOS DLP/DLM 0.8 /spl mu/ and HEMT GaAs 0.2 /spl mu/, using compatible front-side bulk micro-machining. MUMPS process is offered as a surface micro-machining allowing one to integrate MEMS only microstructures. This paper describes the services available, focusing on the most advanced IC processes and on the MEMS processes.
Sponsorship	IEEE Electron Devices Soc. IEEE-Solid-State Circuits Soc
Starting Page	47
Ending Page	53
File Size	720105
Page Count	7
File Format	PDF
ISBN	0780372352
DOI	10.1109/MIEL.2002.1003147
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2002-05-12
Publisher Place	Yugoslavia
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	BiCMOS integrated circuits Micromechanical devices HEMTs Gallium arsenide CMOS technology Integrated circuit technology Educational institutions Laboratories Textile industry Prototypes
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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