NDLI: Micro Capacitive Inclination Sensor Utilizing Dielectric Nano-Particles

Content Provider	IEEE Xplore Digital Library
Author	Ueda, H. Ueno, H. Itoigawa, K. Hattori, T.
Copyright Year	2006
Description	Author affiliation: TOKAI RIKA CO., LTD., Aichi, JAPAN (Ueda, H.)
Abstract	We have developed a micro capacitive inclination sensor that has an outer dimension of 5 mm x 5 mm x 1 mm and a linear analog output. This sensor is unique in two ways. Firstly, we have selected a method to improve the permittivity of the dielectric oil by mixing it with dielectric nano-particles. This method allows us to achieve miniaturization and high performance of the sensor easily. The second feature is the adoption of a slit structure and a pseudo channel in order to mitigate the influence of the surface tension of the dielectric oil. We have succeeded in improving the permittivity by 50% by mixing the dielectric oil with BaTiO3 nano-particles 30 nm in diameter at a rate of 15% Volume. In addition, as a result of assessing the sensor fabricated, we obtained a linear and analog output within an inclination angle range from -45 ~+45 deg. The detection resolution and the response speed were 0.1 deg or more and 0.79 sec/deg respectively. Based on these achievements, we attained a certain perspective to miniaturize inclination sensors while maintaining their performance at the level of conventional ones.
Starting Page	706
Ending Page	709
File Size	366512
Page Count	4
File Format	PDF
ISBN	0780394755
ISSN	10846999
DOI	10.1109/MEMSYS.2006.1627897
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-01-22
Publisher Place	Turkey
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Capacitive sensors Dielectrics Petroleum Electrodes Permittivity Gas detectors Capacitors Capacitance Surface tension Acceleration
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering

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3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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