NDLI: Novel Solid Micro-Gyroscope

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2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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Table of contents

Nanotechnology: An Overview and Integration with MEMS

CMOS Bidirectional Electrode Array for Electrogenic Cells

Oriented and Vectorial Patterning of Cardiac Myocytes Using a Microfluidic Dielectrophoresis Chip - Towards Engineered Cardiac Tissue with Controlled Macroscopic Anisotropy

A Bulk PZT Microsensor for In-Situ Tissue Contrast Detection During Fine Needle Aspiration Biopsy of Thyroid Nodules

Cell Deformability Monitoring Chips Based on Orifice-Length-Dependent Digital Lysis Rates

MEMS Based Sensors for the Study of Indentation Response of Single Cells

Study of the Flight of Small Liquid Droplets Through a Thin Liquid Film for Picolitre Liquid Transfer

Discrete Chemical Release From a microfluidic Chip

Dual-Axis Electromagnetic Scanning Micromirror Using Radial Magnetic Field

Angle Tunable Liquid Wedge Prism Driven by Electro-Wetting

Transmissive Scanning Micromirrors for Autostereoscopic Display

Manually Re-Writable Panel for Large Area MEMS

Electrowetting-Based Displays: Bringing Microfluidics Alive On-Screen

Bio-Particle Sorting Employing Hydrodynamic Rectification in a Microfluidic Circuit

High Speed Particles and Biomolecules Sorting Microsystem Using Thermosensitive Hydrogel and Water Two-Phase Flow

MEMS Based Integrated Particle Detection Chip for Real Time Environmental Monitoring

High Performance Matched-Mode Tuning Fork Gyroscope

High-Performance SOI-MEMS Gyroscope with Decoupled Oscillation Modes

Self-Magnetic Excitation for In-Plane Mode Resonant Microsensor

Ultrasensitive Mass Sensor Based on Lateral Extensional Mode (LEM) Piezoelectric Resonator

Micromachined SU-8 Probe Integrated with Film-bulk-acoustic Resonant Mass Sensor

A MEMS Condenser Microphone for Consumer Applications

Key Technologies for Healthcare Sensor-Net Services - The Next Technology Frontier Towards Realworld IT -

MEMS Radioisotope-Powered Piezoelectric µ - Power Generator (RPG)

Seismic Power Generator Using High-Performance Polymer Electret

Novel Structure for Passive CO2Degassing in μDMFC

A 32*32 Parylene-Pyrolyzed Carbon Bolometer Imager

A New Three-Dimensional Lithography Using Polymer Dispersed Liquid Crystal (PDLC) Films

Aspect Ratio Dependent Scalloping Attenuation in Drie and an Application to Low-Loss Fiber-Optical Switches

3D Nanohelix Fabrication and 3D Nanometer Assembly by Focused Ion Beam Stress-Introducing Technique

Fabrication of the Flexible Sensor Using SOI Wafer by Removing the Thick Silicon Layer

Alow Temperature Vacuum Package Utilizing Porous Alumina Thin Film Encapsulation

Integrating Optoelectronic Tweezers for Individual Particle Manipulation with Digital Microfluidics Using Electrowetting-On-Dielectric (EWOD)

Muscle Proteins as High Speed Nano Transporters on Micro Patterns

A New Bio-Molecules Decryption Protocol Using Shape Encoded Particles (SEP)

3-D Magnetic Tweezers for Investigation of Mechanical Properties of Single DNA Molecules

Modular MEMS Experimental Platform for Transmission Electron Microscopy

Simultaneous and Independent Measurement of Stress and Temperature Using a Single Field Effect Transistor Based Sensor

Effects of Mechanical Vibrations and Bias Voltage Noise on Phase Noise of MEMS Resonator Based Oscillators

Digitally Frequency-Controllable Dual-Band WLAN Filters Using Micromachined Frequency-Tuning Elements

Passive Contact Force and Active Opening Force Electrostatic Switches for Soft Metal Contact Materials

A Centrifugo-Magnetically Actuated Gas Micropump

Acoustic Ejector with Novel Lens Employing Air-Reflectors

Droplets Oscillation and Continuous Pumping by Asymmetric Electrowetting

A Wettability Switchable Surface Driven by Electrostatic Induced Surface Morphology Change Without Energy Interference On Reagents in Droplets

Dynamics of Silicon Micro-Heaters: Modelling and Experimental Identification

Prediction Method of 3-D Shape Fabricated by Double Exposure Technique in Deep X-Ray Lithography $(D^{2}XRL)$

Uniform Nanoliter Solute Deposition by the Control of Droplet Profile During Evaporation with Microwell

Modeling of Fluidic Self-Assembly for Integration of Silicon Components on Plastic

A Low-Temperature Thermopneumatic Gas Bubble Valve

Spring-On-Tip Nanolithography Probes

Continuous Particle Sorting Utilizing Cascade Squeeze-Jumping Effect Under Microfluidic Configuration

Novel Measurement System of the Friction Coefficients for the Drie Sidewalls

High-Rate Sputtering of Thick PZT Layers for MEMS Actuators

Multi-Functioning AFM Cantilever for Mechanical Tests: Indentation, Strip Bending and Adhesion Tests

Temperature Compensation of a MEMS Resonator Using Quality Factor as a Thermometer

Spider Silk as a New Biomaterial for Mems

Mechanical, Thermal, and Material Influences on Ohmic-Contact-Type MEMS Switch Operation

Back-End-Of-Line Poly-Sige Disk Resonators

Polycrystalline Diamond RFMEMS Resonators with the Highest Quality Factors

Imaging of Acoustic Emission from Vibrating Micro/Nano Structures

Multi-Walled Carbon Nanotube Filled Conductive Elastomers: Materials and Application to Micro Transducers

Vertical and Horizontal Parallel Mounting of Micro Components on a Substrate with High Surface Coverage

New Resist-Coating Technique Using Fine Mist for Three-Dimensional Nanotechnology

Fabricaton of Microspring Probes Using Conductive Paste Dispensing

In-Plane, Hollow Microneedles Via Polymer Investment Molding

On-Chip 2-Axis Optical Fiber Actuator Using Gray-Scale Technology

Interconnection and Packaging for 2D Capacitive Micromachined Ultrasonic Transducer Arrays Based on Through-Wafer Trench Isolation

3D Lithography and Deposition on Highly Structured Surfaces Using Plasma Surface Modification, SAM Coating, and Contact Displacement Electroless Plating

Local Heating of Pyrolyzed Polymer Heaters for Further Carbonization at Higher Temperature

Study and Applications of a Parylene Self-Sealing Structure

Self-Propagating Explosive Reactions in Nanostructured AL/NI Multilayer Films Asalocalized Heat Process Technique Formems

Selective And Direct Gold Electroplating On Silicon Surface For MEMS Applications

The Patterning of Electric Circuits by Mask-Deposition Technology

Superplastic Forming of Bulkmetallic Glass-Atechnology for MEMS and Microstructure Fabrication

Reconstituted Wafer Technology for Heterogeneous Integration

A New Fabrication Method of Nano-Fluidic Filters Using Self-Assembly of Nano-Spheres and Surface Tension

Fabrication of 3D Thin Polymer Structures for Hybrid Sensors and Actuators

A Parametric Study of Dimensional Tolerance and Hydrodynamic Debris Removal in Micro-Electro-Discharge Machining

A Universal Parameter for Silicon Anisotropic Etching Inalkaline Solutions

Micro/Nano Pattern Fabrication Using Ultrafast Laser Surface Modification and Self-Assembled Monolayers

Direct Etch Method for Microfluidic Channel and Nano-Height Post Fabrication by Picoliter Droplets

Flexible Skin with Two-Axis Bending Capability Made Using Weaving-By-Lithography Fabrication Method

Fabrication of Polymeric 3-D Micro-Structures Using Ferrofluid Molds

Non-Destructive Strength Characterization of Full-Wafer Bonds Using a Modified Blister Test Method

Micro-Brush Press-On Contact: A New Technique for Room Temperature Electrical and Mechanical Attachment

Rapid Fabrication Process for High Aspect-Ratio Embedded Microchannels with Orifices Usinga Single SU-8 Layer Onamask

Novel Photolithography to Perform the Oblique Microstructure

Brilliant Dust: Nanoparticle Doped On-Chip Microplasmas for Fluorescent Detection of Biomolecules

Electronic Control of Binding of Genetically Engineered Polypeptides to Microfabricated Structures

S-MAyHEM: A Spectroscopic Microanalytical Hollow Enhanced Magnetron for Explosive Gas Detection

Microfabrication of Helmholtz Coils with Integrated Channels for NMR Spectroscopy

Autonomous Metal Ion Sensors

Micromachined Flow-Through Polymerase Chain Reaction Chip Utilizing Multiple Membrane-Activated Micropumps

Atmospheric Pressure Airmicroplasma Ionization Source for Chemical Analysis Applications

Direct Electrostatic Transportation of Frozen Droplets in Liquid Nitrogen for Single Cryopreserved Cell Processing

Passive Magnetic Separator Integrated with Microfluidic Mixer: Demonstration of Enhanced Capture Efficiency

Optical Temperature Control of Multiple Microheaters Using Digital Micromirror Device

Pneumatic Particle Manipulator with Vibrator Matrix

Optimal Design of Micro Rayleigh-Benard Convection Polymerase Chain Reaction System

Cell Adhesions on Nanoturf Surfaces

Electro-Osmotic Flow Through Closed-Open-Closed Microchannels: An Approach to Hyphenation of Capillary Electrophoresis and Maldi

Needle Micro-Coils for MRS

Compact, Seamless Integration of Active Dosing and Actuation with Microneedles for Transdermal Drug Delivery

Design and Fabrication of a Centrifugally Driven Microfluidic Disk for Fully Integrated Metabolic Assays on Whole Blood

Implantable Ultrasound Emitter Array for Medical Applications

A Continuous Cell Lysis Device Using Focused High Electric Field and Self-Generated Electroosmotic Flow

2-Dimensional SPR Detection System Integrated with Molecular Imprinting Polymer Microarrays Using Microfluidic Technology

Detachable Silicon Microneedle Stamps for Allergy Skin Prick Testing

Nonlinear Electrophoretic Mobility of Large DNA Molecules in Microsystems with Sub-Micron Pillar Arrays

DNA Self-Focusing Chips Using Nonuniformly Distributed Asymmetric Electric Fields

A 3-D Microfluidic/Electronic Scaffold for Increased Viability and Analysis of Thick in Vitro Brain Slices

Biodegradable Polymer Needle Having a Trench for Collecting Blood by Capillary Force

Bio-Sensing with Compact Discs and Nanofibers

A Novel Micro-Tissue Reactor for Maintaining Hepatocytes in Vitro

A Wireless Potentiometric Chemical Sensor Based on a Low Resistance ENOS Capacitive Structure

Three Dimensional Electrode Structure Controlled by Dielectrophoresis for Flow-Through Micro Electroporation System

Monodisperse Anisotropic Polymeric Particles Generated from a Micro Co-Flow System

Electronic Detection of DNA with Amorphous Silicon Nanostructures

Chip-Based High-Sensitivity Detection of Multiple Disease Biomarkers

Lipid Bilayer Microchambers: An Optical Detection System for Membrane Transport

Cell-Based Protein Sensor Array Using Genetically Engineered Microbes

A Highly-Sensitive Differential-Mode Microchemical Sensor Using TFBARs with On-Chip Microheater for Volatile Organic Compound (VOC) Detection

A New Microfluidic Chip for Formation of Micro-Droplets in Liquids Utilizing Active Pneumatic Choppers

Bulk Titanium Microneedles with Embedded Microfluidic Networks for Transdermal Drug Delivery

Microfabrication and Self-Assembly of 3D Microboxes for Biomedical Applications

A 3D Biological Filtration Matrix Using Self-Assembled Microspheres Inside microchannels and Gelatin Sacrificial Layer

Field-effect control of electro-osmotic flow with synchronized AC-switching of channel and gate potentials

Self-Regulated Bio-Nanostructured Membranes for MEMS

Pyrolyzed Polymer as Absorbent of Nitrogen Dioxide Sensor

A Surface Plasmon Resonance Sensor with a V-Shaped Silicon Prism Array

Carrying Target Molecules on Beads by Bio Molecular Motors

Infrared Light Induced Patterning of Proteins on ppNIPAM Thermoresponsive Thin Films: A “Protein Laser Printer”

Arrayed Monodisperse Micro-Alginate Beads in μ-Fluidic Traps for Cell Assay

Direct Handwriting Manipulation of Droplets by Self-Aligned Mirror-Ewod Across a Dielectric Sheet

Real-Time PCR Using a PCR Microchip with Integrated Thermal System and Polymer Waveguides for the Detection of Campylobacter Jejuni

Fabrication of Gold Nanoparticle Using Pulsed Mixing Method with Valveless Micropumps

High Resolution and S/N Ratio Nano Probing System

A Handheld Microdischarge Spectroscopy System for High-Speed Chemical Analysis of Gaseous and Liquid Samples

Self Assembled Monolayer Patterning Using Capillary Force Lithography

A Micro "Flea Circus": Self Assembly of Bacteria Through Spatio-Temporal Control of Aerotaxis

High Sensitivity Particle Detection by Biased AC Electroosmotic Trapping on Cantilever

Controlling Ultra Wide Band Transmissions from a Wireless Micromachined Geiger Counter

Acantilever Microphone Using Resonance of Closed-End Air Columns

Micro Pressure Sensors of 50μM Size Fabricated by a Standard CMOS Foundry and a Novel Post Process

Miniaturised Thermal Flow Sensors for Rough Environments

Piezoresistive Cantilever for Nano-Newton Sensing in Two Dimensions

Temperature Dependence of Quality Factor in MEMS Resonators

Adual Axis Gas Gyroscope Based on Convective and Thermo-Resistive Effects in Silicon with Low Thermal-Induced Stress Sensing Element

A High-Q Length-Extensional Bulk-Modemass Sensor with Annexed Sensing Platforms

Two-Dimensional Silicon Smart Tactile Image-Sensor with Single Sensing Diaphragm Actuated by Vibrating Pressure for Simultaneous Detection of Force and Object Hardness Distributions

A Capacitive Proximity Sensor in Dual Implementation with Tactile Imaging Capability on a Single Flexible Platform For Robot Assistant Applications

Electret Based Wireless Micro Ionizing Radiation Dosimeter

Optical Sensing Inadirectional Memsmicrophone Inspired by the Ears of the Parasitoid Fly, Ormia Ochracea

Capacitive Absolute Pressure Sensor with Vacuum Cavity Formed by Bonding Silicon to Soiwafer for Upper Air Observations

Characteristics of On-Wall In-Tube Thermal Flexible Mass-Flow Sensors

Piezoresistive MEMS Underwater Shear Stress Sensors

Parylene Accelerometer Utilizing Spiral Beams

Novel Solid Micro-Gyroscope

Resonant Metal Cantilever with Attogram/Hz Mass Sensitivity Fully Integrated in a Standard 0.35-μm CMOS Process

A Highly Sensitive CMOS-MEMS Capacitive Tactile Sensor

An Orthogonal Fluxgate-Typemagnetic Microsensor

Fabrication Ofrigid Backplate Condensermicrophone Using Drie and Wafer Bonding Technology

A Three Dimensional Microflown

Drag Force Actuated Bistable Microswitches for Flow Sensing

Insertion Force Sensor by Sidewall-Doping with Rapid Thermal Diffusion

High Tuning Range Parallel Plate MEMS Variable Capacitors with Arrays of Supporting Beams

Ultra-Thick and High-Aspect-Ratio Nickel Microgyroscope Using EFAB TM Multi-Layer Additive Electroforming

Design And Fabrication of Anautomatic Mode Controlled Vibratory Gyroscope

3-Axes Flexible Tactile Sensor Fabricated by Si Micromachining and Packaging Technology

A Multichannel Nanoparticle Scintillation Microdevice with Integrated Waveguides for Alpha, Beta, Gamma, X-Ray, and Neutron Detection

Design and Fabrication of 2D Phononic Crystals in Surface Acoustic wave Micro Devices

Integrated Six-Degree-Of-Freedom Sensing for Orthodontic Smart Brackets

Artificial Lateral Line And Hydrodynamic Object Tracking

A Novel High Performance Micromechanical Resonant Electrostatic Field Sensor Used In Atmospheric Electric Field Detection

Shock Protection Using Integrated Nonlinear Spring Shock Stops

Micro Capacitive Inclination Sensor Utilizing Dielectric Nano-Particles

A Digitally Controlled MEMS Gyroscope With Unconstrained Sigma-Delta Force-Feedback Architecture

A Polymer-Based Flexible Tactile Sensor for Normal and Shear Load Detection

Parallel Plate Electrostatic Actuators in Liquids: Displacement-Voltage Optimisation for Microfluidic Applications

Normally-Closed Electrostatic Micro Valve with Pressure Balance Mechanism for Portable Fuel Cell Application

Zero-Power Latching, Large-Stroke, High-Precision Linear Microactuator for Lightweight Structures in Space

Practical High-Speed Metal-Based Optical Microscanning Devices with Low Production Cost

Vertical Drive Micro Actuator Using SMA Thin Film For A Smart Button

Compliance-Based Latchable Microfluidic Actuators Using a Paraffin Wax

EWOD (Electrowetting-on-Dielectric) Actuated Optical Micromirror

Electrostatically-Controlled, Self-Pneumatically-Actuated Microvalve with High Pressure Tolerance and Low Pressure Loss

A Planar 3 DOF Sample Manipulator for Nano-Scale Characterization

A Micromachined Titanium Sputter Ion Pump for Cavity Pressure Control

Compact And Stress-Released Piston Tip-Tilt Mirror

Analysis and Experiment of Diaphragm Deflection By a Shear Mode PZT Actuator in Microfluidic Application

A Touch-Mode Capacitance Microvalve Equipped with High Speed and Pressure Microsecond Switching Performance

A Novel Elastomer Membrane Micropump with Embedded Coils for Off-Chip Pumping Applications

A Novel Coil-Less Lorentz Force 2D Scanning Mirror Using Eddy Current

Piezoelectric Actuator Integrated Cantilever with Tunable Spring Constant For Atom Probe

Peristaltic PDMS Pump with Perfect Dynamic Valves for Both Gas and Liquid

Pressure-Independent Micropump with Piezoelectric Valves for Low Flow Drug Delivery Systems

A Novel Type of Mechanical Power Transmission Array for Switching Densely – Arrayed Actuator Systems

Ferromagnetic Shape Memory Actuator for Large 2D Optical Scanning

Picoliter Controllable Syringes Driven by Parallel Motions of Electrostatic Controlled Linear Inchworm Actuator

Frequency Controlled Bidirectional Ratcheting Biomimetic Motion

Gas Generator Actuator Arrays for Flight Control of Spinning Body Projectiles

Serially-Connected Weight-Balanced Digital Actuators for Wide-Range, High-Precision, Low-Voltage Displacement Control

Fabrication and Characterization of an Electrostatic Contraction Beams Micromotor

Nanometer Scale Actuation Of Magnetic Head Elements in Hard Disk Drives with Built-In Microheater

Measurement of Light Intensity Field with a Fluorescent Bead Cantilever

Self-Assembled High NA Microball Lens Arrays

Design and Experiment of 3-Dimensional Micro-Optical System for MEMS Tunable Lasers

Photonic Crystal Attenuator with a Flexible Waveguide and Nano-Rods

A Single-Layer Multiple Degree-Of-Freedom PDMS-On-Silicon Dynamic Focus Micro-Lens

Nanometer-Order Control of MEMS Ribbons for Blazed Grating Light Valves

Pneumatically Actuated, Membrane-Based, Micro-Optical Devices

A Temperature-Gradient Driven Micromirror with Large Angles and High Frequencies

Subwavelength Metal Grating Tunable Filter

MEMS Tunable Optical Filter Using Auto-Cloned Photonic Crystal

Two-Dimensional MEMS Scanner for Dual-Axes Confocal in Vivo Microscopy

Disk-Array Design for Suppression of Unwanted Modes in Micromechanical Composite-Array Filters

A Monolithic Surface Micromachined Half-Coaxial Transmission Line Filter

A Millimeterwave Microstrip Antenna with Micromachined Wafer-Level Stacking Structure

Laterally Actuated, Low Voltage, 3-Port RF MEMS Switch

Ultra-Low Voltage MEMS Resonator Based on RSG-MOSFET

Rotary RF MEMS Switch Based on the Wobble Motor Principle

Effect of Gas Pressure on the Lifetime of Capacitive RF MEMS Switches

Channel-Select Micromechanical Filters Using High-K Dielectrically Transduced MEMS Resonators

Mechanically Tri-Stable In-Line Single-Pole-Double-Throw All-Metal Switch

A Comparison Between Tunable Fbars with an Integrated and with a Discrete Variable MEMS Capacitor

Mechanically Coupled Contour Mode Piezoelectric Aluminum Nitride MEMS Filters

Temperature Compensated IBAR Reference Oscillators

Density Control of Carbon Nanotubes Using Ethanol Vapor Flow

Microassembled MEMS Minisem with Carbon Nanotube Emitter

Wafer-Level Transfer of Thermo-Piezoelectric Si3N4Cantilever Array on a CMOS Circuit for High Density Probe-Based Data Storage

E-Beam Photoresist and Carbon Nanotubes as Biomimetic Dry Adhesives

Post-Processing Techniques for the Integration of Silicon Nanowires and MEMS

A One-Compartment, Direct Glucose Fuel Cell for Powering Long-Term Medical Implants

A Microfabricated Direct Methanol Fuel Cell with Integrated Electroosmotic Pump

Development of Methanol Steam Reforming System Integrated with Catalytic Combustor Using Carbon Nanotubes as Catalyst Supports

Flexible Thin-Film BiTe Thermopile for Room Temperature Power Generation

Three-Dimensional Nickel-Zinc Microbatteries

Assembly and Hermetic Encapsulation of Wafer Level Secondary Batteries

18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005.

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest

The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE

Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266)

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)

Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291)

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176

Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots

Proceedings of Ninth International Workshop on Micro Electromechanical Systems

Proceedings IEEE Micro Electro Mechanical Systems. 1995

Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems

[1993] Proceedings IEEE Micro Electro Mechanical Systems

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IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'

Novel Solid Micro-Gyroscope

Content Provider	IEEE Xplore Digital Library
Author	Maenaka, K. Kohara, H. Nishimura, M. Fujita, T. Takayama, Y.
Copyright Year	2006
Description	Author affiliation: University of Hyogo, JAPAN (Maenaka, K.)
Abstract	This paper reports a novel structure for improving resistance to acceleration or shock in micro-gyroscopes. The novel device reported here is completely "solid", which is quite unlike any conventional micromachined-gyroscope. It has extremely simple structure and fabrication steps. When a longitudinal vibration is excited in PZT rectangular prism as a reference vibration, differential output voltage by the Coriolis force can be obtained on the PZT surface. The paper shows the operation principle, results from FEM analysis, and preliminary experimental results by the test device.
Starting Page	634
Ending Page	637
File Size	1409362
Page Count	4
File Format	PDF
ISBN	0780394755
ISSN	10846999
DOI	10.1109/MEMSYS.2006.1627879
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-01-22
Publisher Place	Turkey
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Solids Acceleration Electric shock Gyroscopes Springs Resonance Micromechanical devices Electrodes Shape Angular velocity
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering

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