NDLI: Accurate phase measurement in phase-shift masks with a differential heterodyne interferometer

Content Provider	IEEE Xplore Digital Library
Author	Fujita, H. Miyashita, H. Nakamura, H. Sano, H.
Copyright Year	1994
Description	Author affiliation: Micro Products Res. Lab., Dai Nippon Printing Co. Ltd., Saitama, Japan (Fujita, H.; Miyashita, H.; Nakamura, H.; Sano, H.)
Abstract	The ability of the revised version of a phase-shift measuring system 1PM11, developed by Lasertec, is evaluated. When a newly-equipped 60/spl times/ objective lens being used, the beam is 1.6 /spl mu/m in diameter and the distance of the two beam spots is adjustable from 2.9 to 5.1 /spl mu/m. These features are suitable for measurement of photomasks for 64 M bit dynamic random access memories. The stability is found to be improved from 0.5-0.8 degrees (3/spl sigma/) to 0.1-0.3 degrees. The repeatability is found to be 0.1-0.4 degrees (3/spl sigma/) for etched-quartz shifters, and 0.2-0.8 degrees for attenuating bilayered shifters. The above values are also satisfactory. This improvement can be attributed to the revision of its modulation subsystem. Three types of phase shift masks with 1) a shifter of etched quartz, 2) a spin-on-glass shifter on etchstop/quartz, and 3) an attenuating, monolayered shifter, are measured. The agreement between measurement and calculation is reasonable for all cases. A possibility of using 1PM11 for the process control of masks with attenuated, bilayered shifters is demonstrated.
Starting Page	683
Ending Page	688
File Size	554629
Page Count	6
File Format	PDF
ISBN	0780318803
DOI	10.1109/IMTC.1994.352007
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1994-05-10
Publisher Place	Japan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Phase measurement Phase shifting interferometry Optical interferometry Optical mixing Optical modulation Laser beams Wavelength measurement Optical attenuators Optical refraction Optical variables control
Content Type	Text
Resource Type	Article

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