NDLI: SAW pressure sensors

Content Provider	IEEE Xplore Digital Library
Author	Yarovkin, I.B. Vlassov, Yu.N. Kozlov, A.S. Pashchin, N.S.
Copyright Year	1994
Description	Author affiliation: Inst. of Semicond. Phys., Acad. of Sci., Novosibirsk, Russia (Yarovkin, I.B.; Vlassov, Yu.N.; Kozlov, A.S.; Pashchin, N.S.)
Abstract	The design and performance of two types of SAW pressure sensors have been considered. SAW resonator oscillators with metal strip gratings designed for operation at 200 and 360 MHz have been used in both type devices to study the opportunity of the mechanical pressure measurement became of mechanical loading on Rayleigh surface wave propagation. Such electrical characteristics of SAW resonator as amplitude and phase response are discussed, as well as a geometrical dimensions of the sensitive element and a disposition of SAW structures on it. The sensitivity and the non linearity of both sensors with a sensitive element shaped as an integral crystal diaphragm and sensor with mechanically loaded quartz plates measured and discussed too. Experimental data clearly show that sensitivity and threshold are not independent parameters for this kind of pressure sensor. We studied the opportunity to optimize this parameters for a given pressure range. Finally, recommendations are made for optimal configuration of SAW pressure sensor according to pressure and dynamic range demands. These results are important for the design of SAW pressure sensors intended for operation in gaseous or liquid media.
Starting Page	20
Ending Page	23
File Size	362318
Page Count	4
File Format	PDF
ISBN	0780318803
DOI	10.1109/IMTC.1994.351789
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1994-05-10
Publisher Place	Japan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Surface acoustic waves Mechanical sensors Sensor phenomena and characterization Oscillators Strips Gratings Pressure measurement Surface waves Electric variables Linearity
Content Type	Text
Resource Type	Article

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