NDLI: Nanometer optical coherence tomography using broad-bandwidth XUV and soft x-ray radiation

Content Provider	IEEE Xplore Digital Library
Author	Fuchs, S. Blinne, A. Rodel, C. Zastrau, U. Hilbert, V. Wunsche, M. Forster, E. Paulus, G.G.
Copyright Year	2013
Description	Author affiliation: Inst. of Opt. & Quantum Electron., Friedrich-Schiller Univ. of Jena, Jena, Germany (Fuchs, S.; Blinne, A.; Rodel, C.; Zastrau, U.; Hilbert, V.; Wunsche, M.; Forster, E.; Paulus, G.G.)
Abstract	Optical coherence tomography (OCT) is a well-established method to retrieve three-dimensional, cross-sectional images of biological samples in a non-invasive way using near-infrared radiation. The axial resolution of OCT is in the order of the coherence length $l_{c}$ ∝ $λ_{0}^{2}/Δλ_{FWHM}$ which depends on the central wavelength $λ_{0}$ and the spectral width (FWHM) $Δλ_{FWHM}$ of a light source. OCT with broadband visible and near-infrared sources typically reaches axial (depth) resolutions in the order of a few micrometers [1]. The new method presented here takes advantage of the fact that the coherence length and therefore the axial resolution of OCT can be significantly reduced if broadband XUV and SXR radiation is used. The broadness of the usable XUV spectrum is limited by absorption edges of the sample materials. For instance, the silicon transmission window (30-99 eV) corresponds to a coherence length and therefore a possible axial resolution of about 12 nm, thus suggesting applications for semiconductor inspection. In the water window at 280-530 eV a coherence length as short as 3 nm can be achieved and highlights possible applications of XCT for life sciences.
Sponsorship	Eur. Phys. Soc.
Starting Page	1
Ending Page	1
File Size	119271
Page Count	1
File Format	PDF
e-ISBN	9781479905942
DOI	10.1109/CLEOE-IQEC.2013.6801207
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2013-05-12
Publisher Place	Germany
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Optical interferometry Gold Coherence Tomography Optical imaging Silicon Broadband communication
Content Type	Text
Resource Type	Article

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