NDLI: 1.5-GHz CMOS voltage-controlled oscillator based on thickness-field-excited piezoelectric AlN contour-mode MEMS resonators

Content Provider	IEEE Xplore Digital Library
Author	Chengjie Zuo Van der Spiegel, J. Piazza, G.
Copyright Year	2010
Description	Author affiliation: Department of Electrical and Systems Engineering, University of Pennsylvania, Philadelphia, 19104, USA (Chengjie Zuo; Van der Spiegel, J.; Piazza, G.)
Abstract	This paper reports on the first demonstration of a 1.5 GHz CMOS oscillator based on thickness-field-excited (TFE) piezoelectric AlN MEMS contour-mode resonators (CMRs). The measured phase noise is −85 dBc/Hz at 10 kHz offset frequency and −151 dBc/Hz at 1 MHz. This is the highest frequency MEMS oscillator ever reported using a laterally vibrating mechanical resonator. The high frequency operation has been enabled by optimizing the geometrical design and micro-fabrication process of TFE AlN CMRs, so that a low effective motional resistance around 50 Ω is achieved together with a high unloaded quality factor (Qu) approaching 2500 and simultaneously high $k^{2}t$ up to 1.96%. A tunable-supply oscillator design is proposed for fine frequency tuning (or trimming) over a narrow bandwidth. The circuit design enables a novel GHz voltage-controlled oscillator (VCO) without the use of any low-Q tunable component. The 1.5 GHz VCO exhibits a 1500 ppm tuning range by a DC voltage change of 2.5 V. This technique can be utilized for fine frequency trimming and temperature compensation applications.
Starting Page	1
Ending Page	4
File Size	517955
Page Count	4
File Format	PDF
ISBN	9781424457588
ISSN	21523630
e-ISBN	9781424457601
DOI	10.1109/CICC.2010.5617432
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-09-19
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Resonant frequency Micromechanical devices Phase noise Voltage-controlled oscillators Tuning Resistance
Content Type	Text
Resource Type	Article

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