NDLI: Native-conflict-aware wire perturbation for double patterning technology

Content Provider	IEEE Xplore Digital Library
Author	Szu-Yu Chen Yao-Wen Chang
Copyright Year	2010
Description	Author affiliation: Graduate Institute of Electronics Engineering, Department of Electrical Engineering, National Taiwan Univeristy, Taipei 106, Taiwan (Yao-Wen Chang) \|\| Graduate Institute of Electronics Engineering, National Taiwan Univeristy, Taipei 106, Taiwan (Szu-Yu Chen)
Abstract	The double patterning technology (DPT), in which a dense layout pattern is decomposed into two separate masks to relax its pitch, is the most popular lithography solution for the sub-22nm node to enhance pattern printability. Previous works focus on stitch insertion to improve the decomposition success rate. However, there exist native conflicts (NC's) which cannot be resolved by any kind of stitch insertion. A design with NC's is not DPT-compliance and will eventually fail the decomposition, resulting in DFM redesign and longer design cycles. In this paper, we give a sufficient condition for the NC existence and propose a geometry-based method for NC prediction to develop an early stage analyzer for DPT decomposability checking. Then, a wire perturbation algorithm is presented to fix as many NC's in the layout as possible. The algorithm is based on iterative 1D-compaction and can easily be embedded into existing industrial compaction systems. Experimental results show that the proposed algorithm can significantly reduce the number of NC's by an average of 85%, which can effectively increase the decomposition success rate for the next stage.
Starting Page	556
Ending Page	561
File Size	967843
Page Count	6
File Format	PDF
ISBN	9781424481934
ISSN	10923152
e-ISBN	9781424481941
DOI	10.1109/ICCAD.2010.5654200
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-11-07
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Wire Layout Compaction Tiles Algorithm design and analysis Prediction algorithms Prediction methods
Content Type	Text
Resource Type	Article
Subject	Computer Graphics and Computer-Aided Design Computer Science Applications Software

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