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Content Provider | IEEE Xplore Digital Library |
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Author | Kim, Soo Gil Ha, Tae Jung Kim, Seonghyun Lee, Jae Yeon Kim, Kyung Wan Shin, Jung Ho Park, Yong Taek Song, Suk Pyo Kim, Beom Yong Kim, Wan Gee Lee, Jong Chul Lee, Hyun Sun Song, Jong Ho Hwang, Eung Rim Cho, Sang Hoon Ku, Ja Chun Kim, Jong Il Kim, Kyu Sung Yoo, Jong Hee Kim, Hyo Jin Jung, Hoe Gwon Lee, Kee Jeung Chung, Suock Kang, Jong Ho Lee, Jung Hoon Kim, Hyeong Soo Hong, Sung Joo Gibson, Gary Jeon, Yoocharn |
Copyright Year | 2015 |
Description | Author affiliation: R&D division, SK Hynix Inc., 2091 Gyeongchung-daero Bubal-eub, Icheon-si Gyeonggi-do, Korea, 467-701 (Kim, Soo Gil; Ha, Tae Jung; Kim, Seonghyun; Lee, Jae Yeon; Kim, Kyung Wan; Shin, Jung Ho; Park, Yong Taek; Song, Suk Pyo; Kim, Beom Yong; Kim, Wan Gee; Lee, Jong Chul; Lee, Hyun Sun; Song, Jong Ho; Hwang, Eung Rim; Cho, Sang Hoon; Ku, Ja Chun; Kim, Jong Il; Kim, Kyu Sung; Yoo, Jong Hee; Kim, Hyo Jin; Jung, Hoe Gwon; Lee, Kee Jeung; Chung, Suock; Kang, Jong Ho; Lee, Jung Hoon; Kim, Hyeong Soo; Hong, Sung Joo) || HP laboratories, 1501 Page Mill Rd., Palo Alto, CA, USA 94304 (Gibson, Gary; Jeon, Yoocharn) |
Abstract | In this paper, the authors report that 2x nm cross-point ReRAM with 1S1R structure has been successfully developed. Off-current at 1/2 Vsw of 1S1R is one of key factor for high-density ReRAM. NbO2 was chosen as a selector material and off-current and forming characteristics were improved by using stack engineering of top and bottom barriers as well as spacer materials. Finally array operation was characterized with the integration of selector and resistor materials. |
File Size | 1702637 |
File Format | |
ISSN | 2156017X |
e-ISBN | 9781467398947 |
DOI | 10.1109/IEDM.2015.7409668 |
Language | English |
Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Publisher Date | 2015-12-07 |
Publisher Place | USA |
Access Restriction | Subscribed |
Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subject Keyword | Resistors Current measurement Switches Films Transistors CMOS integrated circuits CMOS technology |
Content Type | Text |
Resource Type | Article |
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