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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Colombeau, B. Mok, K.R.C. Yeong, S.H. Benistant, F. Indajang, B. Tan, O. Yang, B. Li, Y. Jaraiz, M. Cowern, N.E.B. Chu, S. |
| Copyright Year | 2006 |
| Description | Author affiliation: Chartered Semiconductor Manufacturing Ltd, 60 Woodlands Industrial Park D, Street 2, Singapore 738406 (Chu, S.) || Chartered Semiconductor Manufacturing Ltd, 60 Woodlands Industrial Park D, Street 2, Singapore 738406. Tel: +65 6360.4504, fax +65 6362.2945 (Mok, K.R.C.; Yeong, S.H.; Benistant, F.; Indajang, B.; Tan, O.; Yang, B.; Li, Y.) || Chartered Semiconductor Manufacturing Ltd, 60 Woodlands Industrial Park D, Street 2, Singapore 738406. Tel: +65 6360.4504, fax +65 6362.2945, email: bcolombeau@charteredsemi.com (Colombeau, B.) || Advanced Technology Institute, University of Surrey, Guildford, Surrey, U.K. (Cowern, N.E.B.) || Department of Electronics, University of Valladolid, 47011 Valladolid, Spain (Jaraiz, M.) |
| Abstract | For the first time, this work shows that the design and optimization of nanoCMOS devices can be achieved from atomistic physics-based process modeling. Remarkable prediction of device characteristics can be obtained even for novel co-implant processes. This extends the strength of TCAD in manufacturing for future generations of nanoCMOS devices. |
| Starting Page | 1 |
| Ending Page | 4 |
| File Size | 616244 |
| Page Count | 4 |
| File Format | |
| ISBN | 142440438X |
| DOI | 10.1109/IEDM.2006.346790 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2006-12-11 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Design optimization Nanoscale devices Predictive models Boron Simulated annealing CMOS technology Pulp manufacturing Semiconductor device manufacture Electronics industry Manufacturing industries |
| Content Type | Text |
| Resource Type | Article |
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