NDLI: Computer aided analysis and design of non-rotationally symmetric electrostatic lens systems

Content Provider	IEEE Xplore Digital Library
Author	Shurn, P.J.
Copyright Year	1976
Description	Author affiliation: GTE Laboratories, Inc., Waltham, Massachusetts (Shurn, P.J.)
Abstract	Computer software has been developed to analyze an arbitrary electrostatic lens system containing geometric asymmetries such as those produced by tolerance variations and electrode misalignment, and predict the behavior of an electron beam in such a lens system. The method employed separates the type of asymmetry from the magnitude of the asymmetry in a particular lens system, thereby greatly reducing the bulk of calculations. The software produces a graphic display of electron trajectories through the actual symmetric lens system. Additionally, coefficients are calculated which describe electron beam deflection as well as departures from the cardinal lens properties of the ideal rotationally symmetric lens system produced by the geometric asymmetry. This software package allows the designer to determine the effect of tolerance variations and other asymmetries on lens performance, thereby enabling him to determine tolerance criteria for the lens. The types of asymmetries and tolerance variations dealt with are: ellipticity, enlargement, offset and tilting of electrodes with respect to the axis of the lens system. Results predicted by the software have been experimentally verified.
Starting Page	523
Ending Page	526
File Size	295484
Page Count	4
File Format	PDF
DOI	10.1109/IEDM.1976.189097
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1976-12-06
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Computer aided analysis Optical design Lenses Electrodes Electron beams Software systems Electrostatic analysis Graphics Displays Software packages
Content Type	Text
Resource Type	Article

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