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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Kim, D.H. Kim, J.Y. Huh, M. Hwang, Y.S. Park, J.M. Han, D.H. Kim, D.I. Cho, M.H. Lee, B.H. Hwang, H.K. Song, J.W. Kang, N.J. Ha, G.W. Song, S.S. Shim, M.S. Kim, S.E. Kwon, J.M. Park, B.J. Oh, H.J. Kim, H.J. Woo, D.S. Jeong, M.Y. Kim, Y.I. Lee, Y.S. Kim, H.J. Shin, J.C. Seo, J.W. Jeong, S.S. Yoon, K.H. Ahn, T.H. Lee, J.B. Hyung, Y.W. Park, S.J. Choi, W.T. Jin, G.Y. Park, Y.G. Kim, K. |
| Copyright Year | 2002 |
| Description | Author affiliation: Semicond. R & D Div., Samsung Electron. Co., Yongin, South Korea (Kim, D.H.; Kim, J.Y.; Huh, M.; Hwang, Y.S.; Park, J.M.; Han, D.H.; Kim, D.I.; Cho, M.H.; Lee, B.H.; Hwang, H.K.; Song, J.W.; Kang, N.J.; Ha, G.W.; Song, S.S.; Shim, M.S.; Kim, S.E.; Kwon, J.M.; Park, B.J.; Oh, H.J.; Kim, H.J.; Woo, D.S.; Jeong, M.Y.; Kim, Y.I.; Lee, Y.S.; Kim, H.J.) |
| Abstract | Fully reliable lean-free stacked capacitor, with the meshes of the supporter made of Si/sub 3/N/sub 4/, has been successfully developed on 80nm COB DRAM application. This novel process terminates persistent problems caused by mechanical instability of storage node with high aspect ratio. With Mechanically Enhanced Storage node for virtually unlimited Height (MESH), the cell capacitance over 30fF/cell has been obtained by using conventional MIS dielectric with an equivalent 2.3nm oxide thickness. This inherently lean-free capacitor makes it possible extending the existing MIS dielectric technology to sub-70nm OCS (one cylindrical storage node) DRAMs. |
| Starting Page | 69 |
| Ending Page | 72 |
| File Size | 344580 |
| Page Count | 4 |
| File Format | |
| ISBN | 0780386841 |
| DOI | 10.1109/IEDM.2004.1419067 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2004-12-13 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Capacitors Random access memory Tin Capacitance Dielectric materials Bridge circuits Glass Strips Manufacturing processes Semiconductor device manufacture |
| Content Type | Text |
| Resource Type | Article |
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