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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Bertani, P. Chang, L.Q. Gallego-Perez, D. Malkoc, V. Lee, L.J. Lu, W. |
| Copyright Year | 2015 |
| Description | Author affiliation: NSEC Center For Affordable Nanoengineering of Polymeric Biomed. Devices, Ohio State Univ., Columbus, OH, USA (Chang, L.Q.; Gallego-Perez, D.; Malkoc, V.; Lee, L.J.) || Dept. of Electr. & Comput. Eng., Ohio State Univ., Columbus, OH, USA (Bertani, P.; Lu, W.) |
| Abstract | Electroporation is a cellular delivery method making use of a voltage pulse to propel exogenous material through the cell membrane and into the cell allowing the modification of a given cell or cell population. An ideal electroporation system would possess four characteristics encompassing the benefits of all these systems: (1) high throughput, (2) high cell viability, (3) excellent deliver efficiency, and (4) controlled dosage. Many $advances^{1-2}$ in cell electroporation allow for high throughput, high cell viability, or excellent dosage control, yet no platform is available for the combination of all three. In this work, we show a “3D nanochannel electroporation (NEP) system” (Fig. 1a) on a silicon-chip platform designed to meet these three criteria. This “NEP chip” is patterned on one side using a ~500 nm circle array and the other using a 50 μm array. Each pattern is then etched through until connection is established as shown in Fig. 1b. The etching of the 3D NEP chip is done using the Bosch process, a combination of $SF_{6}$ and $C_{4}F_{8}$ plasma chemistries giving a highly directional etch for creation of high aspect ratio features. The result is a 3D nanochannel array consisting of nanopores that are ~500 nm in diameter and 20-25 μm deep. The backside microchannel array consists of wells that are 50 μm in diameter and ~225-230 μm deep. |
| Sponsorship | IEEE Electron Devices Soc. |
| Starting Page | 83 |
| Ending Page | 84 |
| File Size | 557151 |
| Page Count | 2 |
| File Format | |
| ISBN | 9781467381345 |
| e-ISBN | 9781467381352 |
| DOI | 10.1109/DRC.2015.7175566 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2015-06-21 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Three-dimensional displays Propulsion Reliability |
| Content Type | Text |
| Resource Type | Article |
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