NDLI: Table of contents

Please wait, while we are loading the content...

2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014)

ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference

2012 SEMI Advanced Semiconductor Manufacturing Conference

ASMC 2012 proceedings produced by: semi [advertisement]

Corporate sponsors

Table of contents

Identifying systematic critical features using silicon diagnosis data

Using selective voltage binning to maximize yield

Analytic modeling of AC response to FET-level elements for CLY optimization

Optimizing product yield using manufacturing defect weights

Improving yield learning by electrical fault inspection

Innovative approach to identify location of AMC source in cleanroom by inverse Computational Fluid Dynamics modeling

Managing variability within wafertest production by combining lean and six sigma

Potentials of condition based monitoring in semiconductor manufacturing

MSC-clustering and forward stepwise regression for virtual metrology in highly correlated input spaces

Rules of automation for 200mm semiconductor manufacturing environment

Post Cu CMP cleaning process evaluation for 32nm and 22nm technology nodes

Bevel RIE application to reduce defectivity in copper BEOL processing

Defect inspection challenges and solutions for ultra-thin SOI

Automated optical inspection for die prep

Optical metrology of thickness and indium composition of epitaxial InxGa1−xAs layers on Si substrates

Measurement strategy for dielectric ultra-thin film characterization by vacuum ultra-violet reflectometry

Automated TEM metrology characterization of Si devices

Optimal wafer site selection using forward selection component analysis

CMOS-integrated geometrically tunable optical filter

Detecting arcing events in semiconductor manufacturing equipment

Detection, binning, and analysis of defects in a GaN-on-Si process for High Brightness Light Emitting Diode's

Scatterometry measurement for SiGe AEI sigma-shaped gate structures of 28nm technology

In-line metrology capability for epitaxial multi-stack SiGe layers

Laser micro-scale thermal wave characterization of heat transport processes in modern semiconductor structures and devices

Development of CMP pad using an unpatterned surface inspection system

Growing the representation of women in leadership: A business imperative IBM Microelectronics' PowerUp initiative

A predictive maintenance system based on regularization methods for ion-implantation

Measuring hydrochloric acid and ammonium hydroxide permeation in bulk chemical distribution

Wafer characterization via sub-nanosecond time-correlated single photon counting

RTO process monitoring with inline non-contact technique

Properties of isolation liner and electrical characteristics of high aspect ratio TSV in 3D stacking technology

Modeling and analysis of integrated planning of production and engineering process improvement

Enabling collaborative solutions across the semiconductor manufacturing ecosystem

Carbonized surface curing for etch-back process

Maintenance pooling to maximize fab uptime

Leveraging Advanced Process Control (APC) technology in developing Predictive Maintenance (PdM) systems

Trench geometry and resist profiles from modeling of polarized optical spectra

Real-time, continuous large particle monitoring for CMP slurry quality control

A comparison of data mining methods for yield modeling, chamber matching and virtual metrology applications

Improved sustainability of an existing fab operation through reduced energy consumption

A failure model of heating filaments in epitaxial growth tools

Influences of etcher chamber condition on critical-dimension shifts in advanced floating gate etching process

The analysis of device performance on a different shallow trench isolation (STI) liner scheme

The study of leakage current performance improvement in high voltage technology

Advanced metrology and gas purifier yield improvement

Analysis of an effect of perturbations in SWHM and illuminating optical scheme parameters on an aerial image

IMPROVE simulation tool: Integrating heterogeneous simulation modules for semiconductor manufacturing processes

Assessing the impact of the 450mm wafer size transition on manufacturing facility automated material handling systems

Operator-free exception measurement logistics for a highly automated 200mm semiconductor manufacturing environment

Improving eco-efficiency via elimination of greenhouse gases from semiconductor dry cleaning processes

Green mode: Equipment interface to reduce semiconductor sub-fab utility consumption

Industry approach to the conflict minerals legislation

Tribological, thermal, and kinetic attributes of 300 vs. 450 mm chemical mechanical planarization processes

A comprehensive approach to process control

An integrated advanced process control on RTP gate oxide thickness and feed-forward implant compensation in mass production

Framework for integration of virtual metrology and predictive maintenance

Optimal tuning of epitaxy pyrometers

Experimental investigation and manufacturing solution of the rapid thermal process induced overlay residue

TiN metal hardmask etch residue removal with mask pullback and complete mask removal for Cu dual damascene device

Humidity rise after purge in micro-environments

A novel approach to optical wafer pre-alignment using innovative ranging edge detectors

Lithography challenges and solutions for MEMS/LED/ABS applications

Enhanced process control of pitch split double patterning by use of CD-SEM critical dimension uniformity and local overlay metrics

Design based classification for process window defect characterization of BEOL ADI layers

A self-aligned double patterning technology using TiN as the sidewall spacer

Enhancements in resizing single crystalline silicon wafers up to 450 mm by using thermal laser separation

Modifying mask blank manufacturing to incorporate cleaning and deposition experimentation

High-k/metal gates in leading edge silicon devices

The hidden productivity: How to get more out of your equipment

Efficient FDC based on hierarchical tool condition monitoring scheme

Predictive sampling approach to dynamically optimize defect density control operations

E-beam inspection for combination use of defect detection and CD measurement

Photo cell monitoring inspection methodology employing a complementary strategy of advanced darkfield and high sensitivity brightfield inspection tools

Use of 22 nm Litho SEM non-visual defect data as a process quality indicator

E-beam inspection for detection of sub-design rule physical defects

A memory volume diagnostics methodology to facilitate production yield learning with embedded memories

TSV RF de-embedding method and modeling for 3DIC

Evaluation of fabrication process for a novel Chip-to-Wafer (C2W) 3D integration approach using an alignment template

New method of WLCSP for process optimization and reliability prediction

New polymerizing chemistries for through-silicon via etching

Decoupling capacitor modeling and characterization for power supply noise in 3D systems

2011 IEEE/SEMI Advanced Semiconductor Manufacturing Conference

2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference

2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference

2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference

The 17th Annual SEMI/IEEE ASMC 2006 Conference

IEEE/SEMI Conference and Workshop on Advanced Semiconductor Manufacturing 2005.

2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (IEEE Cat. No.04CH37530)

Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI

13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259)

2001 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (IEEE Cat. No.01CH37160)

2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 2000 (Cat. No.00CH37072)

10th Annual IEEE/SEMI. Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings (Cat. No.99CH36295)

IEEE/SEMI 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Cat. No.98CH36168)

1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings

IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings

Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Proceedings of 1994 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC)

Proceedings. IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop - ASMC '92 Proceedings

[1991 Proceedings] IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

IEEE/SEMI Conference on Advanced Semiconductor Manufacturing Workshop

Central Library (ISO-9001:2015 Certified)
Indian Institute of Technology Kharagpur
Kharagpur, West Bengal, India | PIN - 721302

See location in the Map
03222 282435
Mail: support@ndl.gov.in

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in