NDLI: Tapered Edge Readout Wiring for Transition Edge Sensor Calorimeter Arrays Using Ion Milling

Content Provider	IEEE Xplore Digital Library
Author	Ezoe, Y. Iijima, N. Yamaguchi, S. Miyazaki, N. Yamada, S. Ishisaki, Y. Ohashi, T. Mitsuda, K. Satoh, T. Hidaka, M.
Copyright Year	2002
Abstract	We are developing transition edge sensor (TES) arrays using multilayer superconducting readout wiring for future X-ray astronomical missions. The TES pixels are formed on the multilayer readout wiring composed of hot and return wires sandwiching an insulation layer. The interface between the wiring and the TES is formed by patterning the topmost wiring layer followed by deposition of the TES layer. To mitigate problems found in a past device, edges of the upper readout wiring are tapered with an ion milling method to enhance an electrical contact between the TES film and the upper readout wiring. To verify this design, we fabricated a 400-pixel test array with the TES pixels on the tapered upper readout wiring. Good physical contact between the TES film and the readout wiring was confirmed with scanning electron microscope. Furthermore, a low transition temperature (~160 mK), a sharp transition edge and a low residual resistance (~1 mΩ) were observed in RT measurements of representative pixels. The critical current was small 10 ~ 30 μA, although it is still larger than the previous device (<; 10 μA). These results suggest that this method will enable a multilayer wiring TES array with good electrical properties.
Sponsorship	Council on Superconductivity Appl. Superconductivity Conference Inc MIT
Starting Page	1
Ending Page	5
Page Count	5
File Size	933079
File Format	PDF
ISSN	10518223
Volume Number	25
Issue Number	3
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-01-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Wiring Nonhomogeneous media Films Milling Temperature measurement Contacts Gold x-ray astronomy ion milling micromachining microstrip x-ray microcalorimeter X-ray microcalorimeter Ion milling X-ray astronomy
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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Development of Multilayer Readout Wiring for Large-Format TES X-Ray Microcalorimeter Arrays

Development of Superconducting Multilayer Wiring for a 400-Pixel TES X-ray Microcalorimeter Array

Optimization of Structure of Large Format TES Arrays

Large 256-Pixel X-ray Transition-Edge Sensor Arrays With Mo/TiW/Cu Trilayers

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Uniformity of Kilo-Pixel Arrays of Transition-Edge Sensors for X-ray Astronomy

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Tapered Edge Readout Wiring for Transition Edge Sensor Calorimeter Arrays Using Ion Milling

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