NDLI: Parylene Micro-Membrane Capacitive Bio/Chemical Sensor

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Satyanarayana, Srinath Daniel, T. Mccormick Majumdar, Arunava
Copyright Year	2005
Abstract	Micro-fabricated sensor arrays have immense potential to become an accurate, quantitative and high-throughput analysis tool for chemical and biological sensing. In the recent years, several microcantilever sensors using surface stress transduction principle have been developed to address this need [1]. However, the design of these sensors is limited by the high mechanical rigidity of the silicon based materials used in fabrication. The cantilever geometry also has limitations in liquid media, which is common in biological applications, because of non-specific adsorption on the back side of the cantilever. The optical detection methods used for measuring the microcantilever deflection are also not amenable to miniaturization. In this paper we demonstrate a novel parylene micro-membrane sensor that exploits the low mechanical stiffness of polymers and addresses the above issues. The concept of a polymer micro-membrane surface stress sensor was first presented by the authors using parylene as the membrane material [2] and later by Rodriguez et al using PDMS membranes [3]. The salient features of the sensor are that it: (i) is label free; (ii) is a universal platform - suitable for both chemical and biological sensing, (iii) uses electronic (capacitive detection) readout; (iv) has integrated microfluidics for addressing individual sensors on the chip (v) is capable of handling both liquid and gas samples; (vi) is made using standard low temperature microfabrication processes (< 120 C); and (vii) can readily be scaled and multiplexed.
Sponsorship	Microelectromechanical Systems Division
Starting Page	551
Ending Page	552
Page Count	2
File Format	PDF
ISBN	079184224X
DOI	10.1115/IMECE2005-82017
e-ISBN	0791837696
Volume Number	Microelectromechanical Systems
Conference Proceedings	ASME 2005 International Mechanical Engineering Congress and Exposition
Language	English
Publisher Date	2005-11-05
Publisher Place	Orlando, Florida, USA
Access Restriction	Subscribed
Subject Keyword	Membranes Deflection Plasma desorption mass spectrometry Stress Cantilevers Design Geometry Microfabrication Stiffness Silicon Sensors Manufacturing Polymers Microfluidics Low temperature
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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