NDLI: Fabrication and Characterization of Liquid and Gaseous Micro- and Nanojets

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Naik, Nisarga Courcimault, Christophe Hunter, Hanif Berg, John Lee, Jungchul Naeli, Kianoush Wright, Tanya Allen, Mark Brand, Oliver Glezer, Ari King, William
Copyright Year	2005
Abstract	This paper reports on the fabrication and characterization of liquid and gaseous jets ejected from microfabricated nozzles with dimensions ranging from 500 nm to 12 μm. Unlike previous work reporting the fabrication of nano-orifices defined within the thickness of the substrates [1-4], the in-plane nanonozzles presented in this paper are designed to sustain the high pressures necessary to obtain substantial nanofluidic jet flows. This approach also allows important three-dimensional features of nozzle, channel and fluidic reservoir to be defined by design and not by fabrication constraints, thereby meeting important fluid-mechanical criteria such as a fully-developed flow. The shrinking jet dimensions demand new metrology tools to investigate their flow behavior. A laser shadowgraphy technique is used to visualize and image the jet flows. Micromachined heated and piezoresistive cantilevers are used to investigate the thrust and heat flux characteristics of the jets.
Sponsorship	Microelectromechanical Systems Division
Starting Page	731
Ending Page	736
Page Count	6
File Format	PDF
ISBN	079184224X
DOI	10.1115/IMECE2005-81698
e-ISBN	0791837696
Volume Number	Microelectromechanical Systems
Conference Proceedings	ASME 2005 International Mechanical Engineering Congress and Exposition
Language	English
Publisher Date	2005-11-05
Publisher Place	Orlando, Florida, USA
Access Restriction	Subscribed
Subject Keyword	Micro/nanonozzle Laser shadowgraphy Cantilever Koh wet etching Micro/nanojet Fluid mechanics Micromachining Dimensions Shrinkage (materials) Chemical etching Flow (dynamics) Heat flux Cantilevers Design Nanonozzles Lasers Orifices Metrology Jets Nozzles Reservoirs Nanofluidics Manufacturing Thrust
Content Type	Text
Resource Type	Article

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