NDLI: Microelectromechanical Wavelength-Selective Switching for Integrated Optics

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Waller, Laura Takahashi, Satoshi Gregory, N. Nielson Seneviratne, Dilan Tuller, Harry Barbastathis, George
Copyright Year	2005
Abstract	In this paper, we present design, fabrication, and test results of a novel wavelength-selective MEMS switch for integrated optics. The device is based on switching of a ring resonator add-drop filter by use of an electrostatically-actuated MEMS bridge. We have demonstrated the wavelength-dependant switching capabilities of a prototype device; however, the residual stress in the bridge caused sagging of the bridge and high insertion loss to the optical output. Therefore, we are investigating the use of titanium nitride (TiN) for the MEMS bridge material. TiN has ideal characteristics both mechanically and electrically. It can also be annealed to lower the residual stress to almost zero. We have fabricated the MEMS bridge with TiN and done some preliminary experiments on the structure. The results show promise for the use of this material in our device, and more generally as a structural material. We have also designed closed-loop feedback control for precision positioning of the bridge. This enables this device to tune the selected wavelength over one full channel (30nm) for use as a tunable optical filter. The feedback scheme is based on using the bridge as one electrode of a capacitive sensor, and simulations indicate that the bridge position can be controlled to 2.5pm accuracy. Modifications of the device could also be used as a variable optical attenuator.
Sponsorship	Microelectromechanical Systems Division
Starting Page	525
Ending Page	529
Page Count	5
File Format	PDF
ISBN	079184224X
DOI	10.1115/IMECE2005-81773
e-ISBN	0791837696
Volume Number	Microelectromechanical Systems
Conference Proceedings	ASME 2005 International Mechanical Engineering Congress and Exposition
Language	English
Publisher Date	2005-11-05
Publisher Place	Orlando, Florida, USA
Access Restriction	Subscribed
Subject Keyword	Microelectromechanical systems Bridges (structures) Switches Optics Wavelength Stress Design Electrodes Filters Simulation Feedback Titanium Engineering simulation Manufacturing Sensors Engineering prototypes
Content Type	Text
Resource Type	Article

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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