NDLI: Fabrication and Characterization of NEMS-Based Single Nanotube Emitter Arrays

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Dong, Lixin Subramanian, Arunkumar Bradley, J. Nelson
Copyright Year	2005
Abstract	Arrays of individual carbon nanotube (CNT) emitters for nanoelectromechanical systems (NEMS) are constructed and characterized. Vertically aligned single multi-walled carbon nanotubes (MWNTs) are realized using a combination of e-beam lithography and plasma-enhanced chemical vapour deposition (PECVD) growth. Field emission properties of the arrays are investigated inside a scanning electron microscope (SEM) using scanning anode field emission microscopy (SAFEM) realized from a scanning anode actuated by a 3-DOF nanorobotic manipulator with sub-nanometer resolution. With the SA-FEM and the arrays of single MWNTs, a linear nano encoder is proposed. Vertical position is detected by the change in emission current, whereas the horizontal position of the scanning anode is sensed from the emission distribution. A resolution of 98.3 nm in the vertical direction and 38.0 nm (best: 12.9 nm) in the lateral direction has been achieved. Failure mechanisms of the emitters are systematically investigated in theory and experiment. Failure modes include opening, shortening, breaking, eradicating, and telescoping, which can be identified/monitored with I-V curves and Fowler-Nordheim plots of field emission. Controlled “failures” can find applications in length modification of individual tubes in an array. As an example, selective eradication for fabricating a patterned emitter array is demonstrated. Such techniques will in turn enable applications in NEMS such as field emission based sensor and actuator arrays, nanoelectronics such as wiring or in situ construction of functional elements.
Sponsorship	Microelectromechanical Systems Division
Starting Page	447
Ending Page	456
Page Count	10
File Format	PDF
ISBN	079184224X
DOI	10.1115/IMECE2005-80212
e-ISBN	0791837696
Volume Number	Microelectromechanical Systems
Conference Proceedings	ASME 2005 International Mechanical Engineering Congress and Exposition
Language	English
Publisher Date	2005-11-05
Publisher Place	Orlando, Florida, USA
Access Restriction	Subscribed
Subject Keyword	Carbon nanotubes Selective eradication Nems Field emitters Nano encoders Manufacturing Nanoelectromechanical systems Nanotubes
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Assembly of arrays of individual lateral nanotube emitters on nanoelectrodes

Potential of carbon nanotubes for sensor applications

Field-emission characteristics from carbon nanotube field emitter arrays (CNT FEAs) grown on silicon emitters

Potential of carbon nanotubes for sensor applications

Single walled carbon nanotubes as active elements in nano bridge based NEMS

Design and fabrication of JFET-controlled carbon nanotube field emitter arrays

In Situ Characterization of Individual Carbon Nanotube Field Emitters with Single Crystalline Cu Tips

Concepts for Carbon Nanotube Sensors

Point-type carbon nanotube field emitters

Fabrication and Characterization of NEMS-Based Single Nanotube Emitter Arrays

Similar Documents

Assembly of arrays of individual lateral nanotube emitters on nanoelectrodes

Potential of carbon nanotubes for sensor applications

Field-emission characteristics from carbon nanotube field emitter arrays (CNT FEAs) grown on silicon emitters

Potential of carbon nanotubes for sensor applications

Single walled carbon nanotubes as active elements in nano bridge based NEMS

Design and fabrication of JFET-controlled carbon nanotube field emitter arrays

In Situ Characterization of Individual Carbon Nanotube Field Emitters with Single Crystalline Cu Tips

Concepts for Carbon Nanotube Sensors

Point-type carbon nanotube field emitters

Fabrication and Characterization of NEMS-Based Single Nanotube Emitter Arrays