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Effects of $Cl_{2}$-Based Inductively Coupled Plasma Etching of AlGaN on Interface Properties of $Al_{2}O_{3}$/AlGaN/GaN Heterostructures
| Content Provider | Scilit |
|---|---|
| Author | Yatabe, Zenji Hori, Yujin Kim, Sungsik Hashizume, Tamotsu |
| Copyright Year | 2013 |
| Description | Journal: Applied Physics Express |
| Related Links | http://iopscience.iop.org/1882-0786/6/1/016502/pdf/1882-0786_6_1_016502.pdf |
| ISSN | 18820778 |
| e-ISSN | 18820786 |
| DOI | 10.7567/apex.6.016502 |
| Journal | Applied Physics Express |
| Issue Number | 1 |
| Volume Number | 6 |
| Language | English |
| Publisher | IOP Publishing |
| Publisher Date | 2013-01-01 |
| Access Restriction | Open |
| Subject Keyword | Journal: Applied Physics Express |
| Content Type | Text |
| Resource Type | Article |
| Subject | Physics and Astronomy Engineering |