NDLI: Lithography, metrology and nanomanufacturing

Content Provider	Royal Society of Chemistry (RSC)
Author	Liddle, J. Alexander Gallatin, Gregg M.
Copyright Year	2011
Abstract	Semiconductor chip manufacturing is by far the predominant nanomanufacturing technology in the world today. Top-down lithography techniques are used for fabrication of logic and memory chips since, in order to function, these chips must essentially be perfect. Assuring perfection requires expensive metrology. Top of the line logic sells for several hundred thousand dollars per square metre and, even though the required metrology is expensive, it is a small percentage of the overall manufacturing cost. The level of stability and control afforded by current lithography tools means that much of this metrology can be online and statistical. In contrast, many of the novel types of nanomanufacturing currently being developed will produce products worth only a few dollars per square metre. To be cost effective, the required metrology must cost proportionately less. Fortunately many of these nanofabrication techniques, such as block copolymer self-assembly, colloidal self-assembly, DNA origami, roll-2-roll nano-imprint, etc., will not require the same level of perfection to meet specification. Given the variability of these self-assembly processes, in order to maintain process control, these techniques will require some level of real time online metrology. Hence we are led to the conclusion that future nanomanufacturing may well necessitate “cheap” nanometre scale metrology which functions real time and on-line, e.g. at GHz rates, in the production stream. In this paper we review top-down and bottom-up nanofabrication techniques and compare and contrast the various metrology requirements.
Starting Page	2679
Ending Page	2688
Page Count	10
File Format	HTM / HTML PDF
ISSN	20403364
Volume Number	3
Issue Number	7
Journal	Nanoscale
DOI	10.1039/c1nr10046g
Language	English
Publisher	Royal Society of Chemistry
Access Restriction	Open
Subject Keyword	Self-assembly Formal specification Process control Metrology Logic gate Nanometre DNA origami Copolymer Nanolithography
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology

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