NDLI: Microfluidic etching for fabrication of flexible and all-solid-state micro supercapacitor based on MnO<sub>2</sub> nanoparticles

Content Provider	Royal Society of Chemistry (RSC)
Author	Guo, Yuguo Wu, Xinglong Cao, Tingbing Zhang, Lesheng Song, Weiguo Xie, Zhuang Li, Zhibo Xue, Mianqi Ma, Xinlei
Copyright Year	2011
Abstract	Micro-supercapacitors are a promising candidate whose reliability and performances are struggling to meet the energy demands dictated by the incoming generation of miniaturized electronic devices. In this paper, we describe a facile and low-cost method for fabricating flexible and all-solid-state micro supercapacitors by microfluidic etching. The micro-supercapacitor configuration is composed of sub-10-nm-scale MnO2 nanoparticle interdigital microelectrode fingers prepared by microfluidic etching with H3PO4-PVA thin films as both the solid-state electrolyte and the flexible substrate. The entire device shows outstanding electrochemical performances with high specific capacitance and stable cycle life, and the performance can be mostly preserved even conditions of under repeated bending. The technique we describe here is a universal method for fabricating a micro-supercapacitor, since the microfluidic etching can be extended to most active materials which can be used for energy- and power-devices, and there are many other choices for the solid electrolyte. Thus, these micro-supercapacitors provide a promising power source in microelectromechanical systems (MEMS), wearable electronics and other general requirements.
Starting Page	2703
Ending Page	2708
Page Count	6
File Format	HTM / HTML PDF
ISSN	20403364
Volume Number	3
Issue Number	7
Journal	Nanoscale
DOI	10.1039/c0nr00990c
Language	English
Publisher	Royal Society of Chemistry
Access Restriction	Open
Subject Keyword	Microelectromechanical systems Chemical milling Electrode Wearable computer Electrolyte Nanoparticle Electrochemistry Capacitance The Technique
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology

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