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| Content Provider | IET Digital Library |
|---|---|
| Author | Cui, Jian Zhao, Qiancheng |
| Abstract | Bias thermal stability of microelectromechanical system (MEMS) gyroscope is a significant performance parameter for industrial and tactical applications. The quadrature coupling motion and demodulation phase error are two main sources of bias drift. This work presents a MEMS tuning fork gyroscope with dedicated electrostatic correction combs finger structure that can be implemented to suppress the quadrature motion. By utilising a closed-loop control for the coupling stiffness, the temperature variation of quadrature motion achieves >260 times of magnitude reduction, resulting in the thermal bias drift decreased from 0.98 to 0.18°/s with 5.4 times improvement over the temperature from −40 to 60°C. The results indicate that the variation of the quadrature motion is the dominant factor that determines the temperature bias drift of the custom-designed gyroscope. The compensated bias stability (1σ) is measured to be ∼8.6°/h by using temperature self-sensing compensation technique over the whole temperature operating range, which demonstrates a considerably competitive result for the tactical-grade MEMS gyroscope. |
| Starting Page | 234 |
| Ending Page | 238 |
| Page Count | 5 |
| Volume Number | 15 |
| e-ISSN | 17500443 |
| Issue Number | Issue 4, Apr (2020) |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/mnl/15/4 |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/10.1049/mnl.2019.0479 |
| Journal | Micro & Nano Letters |
| Publisher Date | 2020-04-01 |
| Access Restriction | Open |
| Rights Holder | © The Institution of Engineering and Technology |
| Subject Keyword | Bias Thermal Stability Improvement Closed Loop System Closed-loop Control System Compensated Bias Stability Compensation Coupling Stiffness Custom-designed Gyroscope Dedicated Electrostatic Correction Demodulation Phase Error Design And Modelling of MEMS And NEMS Device Finger Structure Gyroscopes MEMS Tuning Fork Gyroscope Microelectromechanical System Gyroscope Micromechanical And Nanomechanical Device And System Micromechanical Device Microsensor Microsensors And Nanosensors Quadrature Coupling Motion Quadrature Motion Correction Self-sensing Compensation Technique Tactical-grade MEMS Gyroscope Temperature -40.0 DegC to 60.0 DegC Temperature Bias Drift Temperature Operating Range Temperature Self-sensing Compensation Temperature Variation Thermal Bias Drift Thermal Stability |
| Content Type | Text |
| Resource Type | Article |
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