NDLI: Optical MEMS accelerometer sensor relying on a micro-ring resonator and an elliptical disk

Content Provider	IET Digital Library
Author	Shotorban, Ali Kazemi Nasaban Jafari, Kian Abedi, Kambiz
Abstract	Here, a novel optical micro-electro-mechanical systems (MEMS) accelerometer sensor based on a micro-ring resonator and an elliptical disk is proposed. The designed optical MEMS accelerometer is then analysed to obtain its functional characteristics. The proposed optical MEMS sensor presents an optical sensitivity of 0.0025 nm/g, a mechanical sensitivity of 1.56 nm/g, a linear measurement range of ±22 g, a first resonance frequency of 13.02 kHz, and a footprint of 34 μm × 50 μm. Furthermore, the achieved functional characteristics of the proposed accelerometer are compared to several recent contributions in the related field. According to this comparison study, the present optical MEMS accelerometer can be a suitable device for many applications ranging from consumer electronics to inertial measurement units.
Starting Page	1102
Ending Page	1106
Page Count	5
ISSN	1751858X
Volume Number	13
e-ISSN	17518598
Issue Number	Issue 7, Oct (2019)
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/iet-cds/13/7
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/10.1049/iet-cds.2019.0029
Journal	IET Circuits, Devices & Systems
Publisher Date	2019-07-12
Access Restriction	Open
Rights Holder	© The Institution of Engineering and Technology
Subject Keyword	Acceleration Accelerometer Elliptical Disk Frequency 13.02 KHz Inertial Measurement Units Mechanical Sensitivity MEMS And NEMS Device Technology Micro-optical Device And Technology Micro-optics Micromechanical And Nanomechanical Device And System Micromechanical Device Microring Resonator Microsensor Microsensors And Nanosensors Optical MEMS Accelerometer Sensor Optical MEMS Sensor Optical Microelectro-mechanical System Optical Sensitivity Resonance Frequency Rotation Measurement Velocity
Content Type	Text
Resource Type	Article
Subject	Control and Systems Engineering Electrical and Electronic Engineering

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