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High thermal stability and low power dissipation PCM with nanoscale oxygen-doped SS thin film

Content Provider	IET Digital Library
Author	You, Haipeng Hu, Yifeng Lai, Tianshu Chou, Qingqian Zhu, Xiaoqin Zou, Hua
Abstract	To improve thermal stability and reduce power dissipation of phase-change memory (PCM), the oxygen-doped Sn15Sb85 (SS) thin film is proposed by magnetron sputtering in this study. Comparing to undoped Sn15Sb85(SS), the oxygen-doped-SS thin film has superior thermal stability and better data retention. Meanwhile, the electrical conductivity of crystallisation oxygen-doped-SS thin film is also lower than that of SS, which means its less power consuming in PCM. The electrical conductivity ratio between amorphous and crystalline states for oxygen-doped SS reaches up to two orders of magnitude. After oxygen doping, the root-mean-square surface roughness from amorphous (0.29 nm) to crystalline (0.46 nm) state for oxygen-doped-SS thin films becomes smaller. The switching time of amorphisation process for the oxygen-doped-SS thin film (∼2.07 ns) is shorter than Ge2Sb2Te5 (GST) (∼3.05 ns). X-ray diffractometer is recorded to investigate the change of crystalline structure. Thus, the authors infer that oxygen-doped SS is a promising phase-change thin film for PCM.
Starting Page	1080
Ending Page	1083
Page Count	4
ISSN	17518741
Volume Number	12
e-ISSN	1751875X
Issue Number	Issue 8, Dec (2018)
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/iet-nbt/12/8
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/10.1049/iet-nbt.2018.5120
Journal	IET Nanobiotechnology
Publisher Date	2018-07-27
Access Restriction	Open
Rights Holder	© The Institution of Engineering and Technology
Subject Keyword	Amorphisation Amorphisation Process Amorphous State Antimony Compounds Crystal Structure Crystal Structure of Specific Inorganic Compounds Crystalline State Crystalline Structure Crystallisation Deposition by Sputtering Doping Doping And Implantation of Impurities Electrical Conductivity Electrical Property of Insulators (thin Films/low-dimensional Structures) Epitaxy High Thermal Stability Low Power Dissipation Magnetron Sputtering Memory Circuit Nanofabrication Nanoscale Oxygen-doped Sn15Sb85 Thin Film Nanostructured Material Oxygen Oxygen Doping Phase Change Memories Phase-change Memory Root-mean-square Surface Roughness Sn15Sb85 Solid Surface Structure Sputter Deposition Structure Surface Resistance Measurement Thermal Stability Thin Film Thin Film Growth X-Ray Diffraction X-Ray Diffractometry
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering Biotechnology

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