NDLI: Locally non-uniform oxidation in self-terminating thermal oxidation assisted wet etching technique for AlGaN/GaN heterostructure

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Locally non-uniform oxidation in self-terminating thermal oxidation assisted wet etching technique for AlGaN/GaN heterostructure

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Locally non-uniform oxidation in self-terminating thermal oxidation assisted wet etching technique for AlGaN/GaN heterostructure

Content Provider	IET Digital Library
Author	Liu, Jingqian Wang, Jinyan Xu, Zhe Jiang, Haisang Yang, Zhenchuan Wang, Maojun Yu, Min Xie, Bing Wu, Wengang Ma, Xiaohua Zhang, Jincheng Hao, Yue
Abstract	The oxidation mechanism in self-terminating wet etching technique with thermal oxidation of AlGaN layer followed by etching in KOH solution is investigated. Spike-shape remnants of oxidised AlGaN are observed at the initial stage of wet etching in KOH solution, which could be completely etched away after enough etching time. Transmission electron microscope/energy dispersive spectroscopy analysis indicates the existence of crystalline AlGaN inside the remnants. Finally, a possible explanation is given that the oxide channels from AlGaN surface towards AlGaN/GaN interface generated during thermal oxidation are firstly etched away at the initial stage of KOH wet etching, then after enough time these remnants with non-c axis crystal orientation surfaces exposed to KOH solution could be completely etched away leaving GaN layer beneath unaffected, which realises self-terminating etching.
Starting Page	1932
Ending Page	1933
Page Count	2
ISSN	00135194
Volume Number	51
e-ISSN	1350911X
Issue Number	Issue 23, Nov (2015)
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/el/51/23
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/10.1049/el.2015.1755
Journal	Electronics Letters
Access Restriction	Open
Rights Holder	© The Institution of Engineering and Technology
Subject Keyword	AlGaN-GaN Aluminium Compound Crystal Orientation Surfaces Electrical Property of Semiconductor-To-Semiconductor Contacts Electromagnetic Radiation Spectrometry (chemical Analysis) Energy Dispersive Spectroscopy Etching Gallium Compound Heterojunction III-V SemiConductor Locally Nonuniform Oxidation Oxidation P-N Junctions Self Terminating Thermal Oxidation Assisted Wet Etching Semiconductor Heterojunction Spike Shape Remnants Surface Treatment And Coating Technique Transmission Electron Microscopy X-Ray Chemical Analysis
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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