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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Ryabchikov, A.I. Stepanov, I.B. Sivin, D.O. Dektyarev, S.V. Dodorin, K.Y. |
| Copyright Year | 2012 |
| Description | Author affiliation: National research Tomsk Polytechnic University, Tomsk Russia (Ryabchikov, A.I.; Stepanov, I.B.; Sivin, D.O.; Dektyarev, S.V.; Dodorin, K.Y.) |
| Abstract | An innovative concept in the development of advanced coating deposition and ion implantation method including an application of filtered DC metal plasma source and high-frequency short-pulsed negative bias voltage with a duty factor in the range 10 ÷ 99% are considered. The regularities of ion implantation and metal plasma deposition for metal samples are theoretically and experimentally investigated. Experimentally has been shown that metal plasma based ion implantation as well as high-concentration metal plasma ion implantation with compensation of ion surface sputtering by metal plasma deposition as well as ion-assisted coating deposition can be realized by variation of bias potential ranging from 0 V to 4 kV, pulse repetition rate smoothly adjusted in the range (2 ÷ $4.4)×10^{5}$ p.p.s. and pulse duration ranging from 0,5 to 2 μs. Special features of the material treatment method depending on plasma concentration, pulse repetition rate and duty factor has been examined. |
| Starting Page | 1 |
| Ending Page | 5 |
| File Size | 299513 |
| Page Count | 5 |
| File Format | |
| ISBN | 9781467317726 |
| e-ISBN | 9781467317733 |
| DOI | 10.1109/IFOST.2012.6357800 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2012-09-18 |
| Publisher Place | Russia |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Electrodes Electric potential vacuum-arc plasma Ion implantation implantation Metals plasma filter plasma-immersion ion Plasmas Coatings Surface treatment |
| Content Type | Text |
| Resource Type | Article |
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