NDLI: Minimum sample size determination for V-Ramp GOI qualification: Extending the methods in JEDEC/FSA joint publication

Content Provider	IEEE Xplore Digital Library
Author	Yang, S.F. Chien, K.W.-T.
Copyright Year	2009
Description	Author affiliation: Corporate Quality and Reliability SMIC Shanghai, China (Yang, S.F.; Chien, K.W.-T.)
Abstract	The V-Ramp test is an important test for GOI (Gate Oxide Integrity) of MOS devices. The criterion for a product under GOI qualification is to meet the requirement with defect density lower than a target defect density (D0). This paper studies the methods and guidelines in minimum sample size determination provided by JEDEC/FSA joint publication and points out their drawbacks, inconsistency, and misguidance. We provide an exact method and easy-to-use numerical solution by extending JEDEC's formula to any allowed failure number, target defect density, and confidence level. Important guidelines are also provided for reliability practitioners to reduce uncertainty resulted from imperfect sampling procedures and to avoid mistakes commonly happened in defect density evaluation against a target D0. Our proposed exact method can be applied on many other reliability tests that need determining a minimum sample size to save wafers and testing resources as long as the binomial distribution is applicable.
Starting Page	46
Ending Page	48
File Size	894808
Page Count	3
File Format	PDF
ISBN	9781424449033
DOI	10.1109/ICRMS.2009.5270243
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-07-20
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Uncertainty Confidence bounds Random sampling Standards publication Stress V-ramp test Guidelines MOS devices GOI (Gate Oxide Integrity) Statistical distributions Sampling methods Binomial distribution Dielectric breakdown Minimum sample size Defect densigy Qualifications Testing
Content Type	Text
Resource Type	Article

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