NDLI: A patterning technique of lead zirconate titanate thin film by ultraviolet-light

Content Provider	IEEE Xplore Digital Library
Author	Chia-Che Wu Chueh-Tang Chang
Copyright Year	2012
Description	Author affiliation: Department of Mechanical Engineering, 1 National Chung Hsing University, 250, Kuo Kuang Road, Taichung, Taiwan, 402 (Chia-Che Wu; Chueh-Tang Chang)
Abstract	The patterning technique of PZT thin film is an essential process in device fabrication processes for application in microsensors and microactuators. Chemical etching and physical etching processes are two of the most commonly used techniques to pattern PZT thin film. However, the difference in etching yields of Pb, Zr, and Ti leads to undesired residues on PZT films in chemical etching process. The poor selectivity of PZT over photoresist mask and platinum electrodes causes unsatisfactory PZT pattern. This thesis developed a PZT pattern technique by photolysis processes PZT thin films were first spin coated on the substrate and exposed by UV light for photolysis step. The UV photolysis step defined exposed and unexposed area by mask, and the pattern will be transferred to PZT thin film. After photolysis, PZT films were placed in non-ionic surfactant to remove unexposed area. Finally, PZT films were sintered at 650°C in the furnace for crystallization. Experimental results showed that remnant polarization of PZT film by UV photolysis was $21.4(µc/cm^{2}),$ which was compared to $17.24(µc/cm^{2})$ by hot plate prolysis. Coercive fields were 45 and 104 kV/cm by UV photolysis and hot plate prolysis, respectively. Dielectric loss was 0.027 by UV photolysis which was much smaller than 0.043 by hot plate prolysis. PZT thin films patterned by UV photolysis showed satisfactory geometries.
Starting Page	27
Ending Page	27
File Size	72935
Page Count	1
File Format	PDF
ISBN	9781467307857
e-ISBN	9782355000218
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-04-25
Publisher Place	France
Access Restriction	Subscribed
Rights Holder	CMP
Subject Keyword	Geometry
Content Type	Text
Resource Type	Article

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A patterning technique of lead zirconate titanate thin film by ultraviolet-light

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