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| Content Provider | IET Digital Library |
|---|---|
| Author | Lu, Jian Takagi, Hideki Maeda, Ryutaro |
| Abstract | In this work, a hydrophobic self-assembled monolayer, perfluorodecyltrichlorosilane (FDTS) (CF3(CF2)7(CH2)2SiCl3), was proposed as a sacrificial layer for a lift-off process of a piezoelectric lead–zirconate–titanate (PZT) thin film on a Pt/Ti/SiO2/Si substrate. A FDTS fine pattern was firstly vapour deposited on a Pt/Ti/SiO2/Si substrate by a lift-off process, and then the PZT precursor was spin-coated on the Pt/Ti/SiO2/Si substrate, post-baked so the solvent decomposed and evaporated and annealed for crystallisation. The experimental results demonstrated that the super-hydrophobic FDTS with a contact angle of >120° is effective in preventing PZT crystallisation because of its thermal stability during PZT post-baking, and its barrier-effects between the spin-coated PZT precursor and the Pt/Ti substrate. After removing the FDTS and the PZT which is on top of the FDTS by a second lift-off process using ultrasonic agitation, a PZT fine pattern was successfully obtained on the Pt/Ti/SiO2/Si substrate with a thickness of 200–300 nm and feature size of a few tens of microns. In this Letter, the hydrophobic properties and surface morphology of different types of FDTS were studied and its barrier-effect on PZT crystallisation were analysed. The effects of PZT thickness in each spin-coating to lift-off the and PZT properties were investigated. The obtained PZT pattern was evaluated by an X-ray diffraction measurement. |
| Starting Page | 138 |
| Ending Page | 142 |
| Page Count | 5 |
| Volume Number | 8 |
| e-ISSN | 17500443 |
| Issue Number | Issue 3, Mar (2013) |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/mnl/8/3 |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/10.1049/mnl.2012.0888 |
| Journal | Micro & Nano Letters |
| Access Restriction | Open |
| Rights Holder | © The Institution of Engineering and Technology |
| Subject Keyword | Angle of Contact Annealing Processes Barrier-effects Contact Angle Crystallisation Dielectric Thin Films Electrostriction Epitaxy Evaporation Fluid Surface Energy Heat And Thermomechanical Treatments Hydrophobic Property Hydrophobic Self-assembled Monolayer Hydrophobicity Interface Tension Lead Compound Lead-zirconate-titanate Crystallisation Lead-zirconate-titanate Fine Pattern Lead-zirconate-titanate Post-baking Lead-zirconate-titanate Property Lead-zirconate-titanate Thickness Effect Lift-off Process Liquid-vapour Transitions Method of Thin Film Deposition MonoLayer MonoLayer And Langmuir-Blodgett Film Perfluorodecyltrichlorosilane Fine Pattern Physical Property of Thin Film Piezoelectric Lead-zirconate-titanate Thin Film Piezoelectric Thin Film Piezoelectricity Pt-Ti-silica-Si Substrate Pt/Ti/SiO2/Si PZT Sacrificial Layer Self-assembly Size 200 Nm to 300 Nm Solid Surface Structure Solvent Decomposition Solvent Evaporation Spin Coating Spin-coated Lead-zirconate-titanate Precursor Spin-coating Structure Superhydrophobic Perfluorodecyltrichlorosilane Surface Modulator/Detector Array Surface Tension Thermal Stability Thin Film Growth Ultrasonic Agitation Vapour Deposition X-Ray Diffraction X-Ray Diffraction Measurement XRD |
| Content Type | Text |
| Resource Type | Article |
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