NDLI: Modeling of an electrostatic torsional micromirror for laser projection system

Content Provider	IEEE Xplore Digital Library
Author	Marchetti, E. Volpi, E. Battini, F. Bacciarelli, L. Fanucci, L. De Marinis, M. Hofmann, U.
Copyright Year	2009
Description	Author affiliation: Fraunhofer Institute for Silicon Technology ISIT, Itzehoe, Germany (Hofmann, U.) \|\| SensorDynamics AG, Navacchio (PI), Italy (De Marinis, M.) \|\| Department of Information Engineering, University of Pisa, Italy (Marchetti, E.; Volpi, E.; Battini, F.; Bacciarelli, L.; Fanucci, L.)
Abstract	This paper presents the Simulink™ model of a new 2D torsional scanning micromirror. This Micro-Opto-Electro-Mechanical-System (MOEMS) is very important towards the integration into a system on a package of a complete laser projection system. Modeling and simulation of the MOEMS is a key point for the development of the proper micromirror electronic conditioning interface thus reducing time to market and production costs. In literature there are not exhaustive examples of complete characterizations of 2D torsional scanning micromirrors. The aim of this work is to develop a Simulink™ model which incorporates the main mechanical and electrostatic parameters of the sensor such as the resonance frequency, the torsional constant and capacitance versus rotation angle characteristic. This model has been successfully verified via experimental measurements and it proved his effectiveness in the development of the relevant electronic conditioning circuitry.
Starting Page	182
Ending Page	186
File Size	420322
Page Count	5
File Format	PDF
ISBN	9781424438747
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-04-01
Publisher Place	Italy
Access Restriction	Subscribed
Rights Holder	EDA Publishing
Subject Keyword	Mechanical sensors Costs Time to market Production Laser modes Capacitive sensors Electrostatics Micromirrors Consumer electronics Electronics packaging
Content Type	Text
Resource Type	Article

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