NDLI: RF MEMS front-end resonator, filters, varactors and a switch using a CMOS-MEMS process

Content Provider	IEEE Xplore Digital Library
Author	Ramstad, J.E. Kjelgaard, K.G. Nordboe, B.E. Soeraasen, O.
Copyright Year	2009
Description	Author affiliation: Department of Informatics, University of Oslo, P.O. Box 1080 Blindern, N-0316, Norway (Ramstad, J.E.; Kjelgaard, K.G.; Nordboe, B.E.; Soeraasen, O.)
Abstract	The paper describes the design of multiple RF MEMS front-end components that could replace off-chip units in future transceivers. The components can effectively be combined and co-fabricated with CMOS circuitry. A CMOS-MEMS approach is used, which means that the microelectromechanical parts are made by multi-layer structures in a standard CMOS process. The ASIMPS procedure offered by CMP uses the CMOS processing at STMicroelectronics, and a simple post-CMOS release-etching step is performed at Carnegie Mellon University, USA. The paper presents a resonator, resonating filters, electrothermally operated varactors and an experimental switch. The components are modeled and simulated by using CoverntorWare FEM software. A test chip is currently in production.
Starting Page	170
Ending Page	175
File Size	694447
Page Count	6
File Format	PDF
ISBN	9781424438747
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-04-01
Publisher Place	Italy
Access Restriction	Subscribed
Rights Holder	EDA Publishing
Subject Keyword	Varactors Semiconductor device modeling Resonator filters Circuits Switches Electrothermal effects Radiofrequency microelectromechanical systems CMOS process Transceivers Testing
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in